Towards achieving nanofinish on silicon (Si) wafer by μ-wire electro-discharge machining
This study investigates the use of nanopowder-mixed dielectric oil and temporary metallic coating on highly doped Si sample to achieve nanometric surface roughness using μ-WEDM operation. To achieve this, two different nanopowders were used in dielectric medium with two different temporary metallic...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English English English |
| Published: |
Springer Verlag
2018
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/66411/ http://irep.iium.edu.my/66411/ http://irep.iium.edu.my/66411/ http://irep.iium.edu.my/66411/18/66411_Towards%20achieving%20nanofinish%20on%20silicon_complete.pdf http://irep.iium.edu.my/66411/7/66411_Towards%20achieving%20nanofinish%20on%20silicon%20SCOPUS.pdf http://irep.iium.edu.my/66411/12/66411%20Towards%20achieving%20nanofinish%20on%20silicon%20WOS.pdf |