Multivariable control designs for piezoelectric tubes
Most AFMs use piezoelectric tube nanopositioners for scanning. Fast actuation of piezoelectric tubes are restricted due to the presence of low mechanical resonant modes. These resonances, when excited, set off vibrations that cause loss of precision and repeatability of the scans. Thereby restrictin...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/6636/ http://irep.iium.edu.my/6636/ http://irep.iium.edu.my/6636/1/Multivariable_Control_Designs_for_Piezoelectric_Tubes.pdf |