Enhanced piezoelectric properties of aluminium doped zinc oxide thin film for surface acoustic wave resonators on a CMOS platform
The increase in frequency spectrum for wireless communication system has led to the growing interest in thin film electroacoustic technology that scales favorably upon miniaturization. Non-ferroelectric piezoelectric thin films such as Zinc Oxide is one of the most promising material for Complementa...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English English English |
| Published: |
Springer New York LLC
2017
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/57290/ http://irep.iium.edu.my/57290/ http://irep.iium.edu.my/57290/ http://irep.iium.edu.my/57290/1/57290_Enhanced%20piezoelectric.pdf http://irep.iium.edu.my/57290/2/57290_Enhanced%20piezoelectric_WOS.pdf http://irep.iium.edu.my/57290/3/57290_Enhanced%20piezoelectric_SCOPUS_new.pdf |