Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator
This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS ap...
| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
IEEE
2016
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/54613/ http://irep.iium.edu.my/54613/ http://irep.iium.edu.my/54613/ http://irep.iium.edu.my/54613/9/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects.pdf http://irep.iium.edu.my/54613/8/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects_Scopus.pdf |