Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator

Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator

This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS ap...

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Main Authors: Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin
Format: Conference or Workshop Item
Language:English
English
Published: IEEE 2016
Subjects:
TK7885 Computer engineering
Online Access:http://irep.iium.edu.my/54613/
http://irep.iium.edu.my/54613/
http://irep.iium.edu.my/54613/
http://irep.iium.edu.my/54613/9/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects.pdf
http://irep.iium.edu.my/54613/8/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects_Scopus.pdf
id iium-54613
recordtype eprints
spelling iium-546132017-05-23T07:57:52Z http://irep.iium.edu.my/54613/ Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin TK7885 Computer engineering This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS approach namely deposition of 3.78 m thickness of Al doped Zinc Oxide (AZO) thin film, photolithography and wet etching. S-parameter measurements shows the series resonance frequency occurred at 1.156 GHz, 1.098 GHz and 0.966 GHz for three different wavelength respectively. The influence of acoustic wavelength on resonance frequency, acoustic wave velocity and electromechanical coupling coefficient were discussed. The best transmission characteristic was observed by Resonator 3 due to highest coupling coefficient of 0.069% and lowest insertion loss of 40.5 dB. The range of extracted SAW velocity is between 4161 m/s to 4497 m/s. Hence, the measurement results are consistent with finite element simulation results with deviation less than 5% in terms of resonance frequency and acoustic wave velocity. IEEE 2016 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/54613/9/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects.pdf application/pdf en http://irep.iium.edu.my/54613/8/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects_Scopus.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin (2016) Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator. In: 6th International Conference on Computer and Communication Engineering (ICCCE 2016), 25th-27th July 2016, Kuala Lumpur. http://ieeexplore.ieee.org/abstract/document/7808371/ 10.1109/ICCCE.2016.113
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
English
topic TK7885 Computer engineering
spellingShingle TK7885 Computer engineering
Md Ralib @ Md Raghib, Aliza 'Aini
Nordin, Anis Nurashikin
Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator
description This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS approach namely deposition of 3.78 m thickness of Al doped Zinc Oxide (AZO) thin film, photolithography and wet etching. S-parameter measurements shows the series resonance frequency occurred at 1.156 GHz, 1.098 GHz and 0.966 GHz for three different wavelength respectively. The influence of acoustic wavelength on resonance frequency, acoustic wave velocity and electromechanical coupling coefficient were discussed. The best transmission characteristic was observed by Resonator 3 due to highest coupling coefficient of 0.069% and lowest insertion loss of 40.5 dB. The range of extracted SAW velocity is between 4161 m/s to 4497 m/s. Hence, the measurement results are consistent with finite element simulation results with deviation less than 5% in terms of resonance frequency and acoustic wave velocity.
format Conference or Workshop Item
author Md Ralib @ Md Raghib, Aliza 'Aini
Nordin, Anis Nurashikin
author_facet Md Ralib @ Md Raghib, Aliza 'Aini
Nordin, Anis Nurashikin
author_sort Md Ralib @ Md Raghib, Aliza 'Aini
title Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator
title_short Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator
title_full Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator
title_fullStr Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator
title_full_unstemmed Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator
title_sort investigation of acoustic wavelength effects on silicon compatible al doped zno saw resonator
publisher IEEE
publishDate 2016
url http://irep.iium.edu.my/54613/
http://irep.iium.edu.my/54613/
http://irep.iium.edu.my/54613/
http://irep.iium.edu.my/54613/9/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects.pdf
http://irep.iium.edu.my/54613/8/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects_Scopus.pdf
first_indexed 2023-09-18T21:17:15Z
last_indexed 2023-09-18T21:17:15Z
_version_ 1777411645474078720

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