Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator
This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS ap...
| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
IEEE
2016
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/54613/ http://irep.iium.edu.my/54613/ http://irep.iium.edu.my/54613/ http://irep.iium.edu.my/54613/9/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects.pdf http://irep.iium.edu.my/54613/8/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects_Scopus.pdf |
| Summary: | This paper addresses the investigation of acoustic
wavelength effects on silicon compatible SAW resonator based on
Al doped ZnO thin film. Three different resonators at acoustic
wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL
Multiphysics. The device is fabricated using post CMOS approach
namely deposition of 3.78 m thickness of Al doped Zinc Oxide
(AZO) thin film, photolithography and wet etching. S-parameter
measurements shows the series resonance frequency occurred at
1.156 GHz, 1.098 GHz and 0.966 GHz for three different
wavelength respectively. The influence of acoustic wavelength on
resonance frequency, acoustic wave velocity and
electromechanical coupling coefficient were discussed. The best
transmission characteristic was observed by Resonator 3 due to
highest coupling coefficient of 0.069% and lowest insertion loss of
40.5 dB. The range of extracted SAW velocity is between 4161 m/s
to 4497 m/s. Hence, the measurement results are consistent with
finite element simulation results with deviation less than 5% in
terms of resonance frequency and acoustic wave velocity. |
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