Design and simulation of MEMS helmholtz resonator for acoustic energy harvester
An acoustic energy harvester using Helmholtz resonator with piezoelectric circular diaphragm has been studied using COMSOL Multiphysics 5.1. In this paper, multiple designs considerations for MEMS Helmholtz resonator and piezoelectric circular diaphragm including the length and radius of the tu...
| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
IEEE
2016
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/54518/ http://irep.iium.edu.my/54518/ http://irep.iium.edu.my/54518/ http://irep.iium.edu.my/54518/1/54518.pdf http://irep.iium.edu.my/54518/2/54518_Design%20and%20Simulation%20of%20MEMS%20Helmholtz%20Resonator%20for%20Acoustic%20Energy%20Harvester_SCOPUS.pdf |
| Summary: | An acoustic energy harvester using Helmholtz
resonator with piezoelectric circular diaphragm has been
studied using COMSOL Multiphysics 5.1. In this paper,
multiple designs considerations for MEMS Helmholtz resonator
and piezoelectric circular diaphragm including the length and
radius of the tube, the radius of the cavity and the thickness of
the circular piezoelectric cantilever have been studied and
investigated by varying it’s size with 5 different values for each
parts in order to find the best size for optimum output voltage.
The input pressure have been set to 1 Pa as default. The
simulation results demonstrated that under the same condition,
a higher output pressure can be formed by having smaller tube
radius and bigger cavity radius of the Helmholtz resonator. The
resonance frequency of the Helmholtz resonator was found at
181 Hz. On the other hand, the interaction between air
pressure’s vibration and piezoelectric diaphragm plays an
important role in determining the amount of harvested acoustic
power and the position of piezoelectric circular diaphragm in
the Helmholtz resonator is at the optimum when it is placed at
the end of the resonator compared to at the beginning of the
resonator’s tube. |
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