Theoretical and simulated investigation of dielectric charging effect on a capacitive RF-MEMS switch
Dielectric charges cause stiction problems in most capacitive RF-MEMS switches, creating a major reliability issue during production. A new method based on finite-element- method simulation is developed in this paper to analyze the dielectric charging effect on the RF-MEMS switch’s pull voltages (na...
| Main Authors: | , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
2016
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/52755/ http://irep.iium.edu.my/52755/ http://irep.iium.edu.my/52755/ http://irep.iium.edu.my/52755/8/52755-new.pdf http://irep.iium.edu.my/52755/9/52755-Theoretical%20and%20simulated%20investigation%20of%20dielectric%20charging%20effect%20on%20a%20capacitive%20RF-MEMS%20switch_SCOPUS.pdf |
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