Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering

This investigation deals with the effect of temperature on the optical and morphological properties of Zinc Oxide thin films prepared by radio-Frequency (RF) magnetron sputtering technique. In the present work, zinc oxide (ZnO) thin films have been deposited on glass substrates from 50°C to 300°C by...

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Main Authors: Mohamad, Souad A., Othman, Maizatulnisa
Format: Article
Language:English
Published: Trans Tech Publications Ltd 2015
Subjects:
Online Access:http://irep.iium.edu.my/52057/
http://irep.iium.edu.my/52057/
http://irep.iium.edu.my/52057/
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spelling iium-520572017-02-17T22:31:29Z http://irep.iium.edu.my/52057/ Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering Mohamad, Souad A. Othman, Maizatulnisa TA Engineering (General). Civil engineering (General) TA401 Materials of engineering and construction This investigation deals with the effect of temperature on the optical and morphological properties of Zinc Oxide thin films prepared by radio-Frequency (RF) magnetron sputtering technique. In the present work, zinc oxide (ZnO) thin films have been deposited on glass substrates from 50°C to 300°C by radio frequency magnetron sputtering. The effects of deposition temperature on the crystallization behaviour and optical properties of the films have been studied. The thin films were characterized using Ultraviolet Visible Spectroscopy (UV-VIS), Field Emission Scanning Electron Microscopy (FESEM) and X-ray Diffraction Analysis (XRD). From the UV-VIS testing, the average transmission percentage of the films is between 80-95% for all deposition temperatures meanwhile the energy gap of ZnO thin films varies from 3.26 eV to 3.35 eV which is not much different from the theoretical value. Also, the grain size is getting smaller from 3.886nm, 3.216nm, 3.119nm and 3.079nm with respect to the increasing deposition temperature 50°C, 100°C, 200°C and 300°C respectively whereas the average grain size per intercept value is increasing. The patterns of the peak were about the same for all deposition temperature where the thin films have polycrystalline hexagonal wurtzite structure with the orientation perpendicular (002) to the substrate surface (c-axis orientation) at 34.5(2θ). Trans Tech Publications Ltd 2015-07-20 Article PeerReviewed application/pdf en http://irep.iium.edu.my/52057/1/1.pdf Mohamad, Souad A. and Othman, Maizatulnisa (2015) Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering. Advanced Materials Research, 1115. pp. 422-425. ISSN 1662-8985 http://www.scientific.net/AMR.1115.422 10.4028/www.scientific.net/AMR.1115.422
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TA Engineering (General). Civil engineering (General)
TA401 Materials of engineering and construction
spellingShingle TA Engineering (General). Civil engineering (General)
TA401 Materials of engineering and construction
Mohamad, Souad A.
Othman, Maizatulnisa
Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
description This investigation deals with the effect of temperature on the optical and morphological properties of Zinc Oxide thin films prepared by radio-Frequency (RF) magnetron sputtering technique. In the present work, zinc oxide (ZnO) thin films have been deposited on glass substrates from 50°C to 300°C by radio frequency magnetron sputtering. The effects of deposition temperature on the crystallization behaviour and optical properties of the films have been studied. The thin films were characterized using Ultraviolet Visible Spectroscopy (UV-VIS), Field Emission Scanning Electron Microscopy (FESEM) and X-ray Diffraction Analysis (XRD). From the UV-VIS testing, the average transmission percentage of the films is between 80-95% for all deposition temperatures meanwhile the energy gap of ZnO thin films varies from 3.26 eV to 3.35 eV which is not much different from the theoretical value. Also, the grain size is getting smaller from 3.886nm, 3.216nm, 3.119nm and 3.079nm with respect to the increasing deposition temperature 50°C, 100°C, 200°C and 300°C respectively whereas the average grain size per intercept value is increasing. The patterns of the peak were about the same for all deposition temperature where the thin films have polycrystalline hexagonal wurtzite structure with the orientation perpendicular (002) to the substrate surface (c-axis orientation) at 34.5(2θ).
format Article
author Mohamad, Souad A.
Othman, Maizatulnisa
author_facet Mohamad, Souad A.
Othman, Maizatulnisa
author_sort Mohamad, Souad A.
title Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
title_short Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
title_full Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
title_fullStr Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
title_full_unstemmed Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
title_sort effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by rf magnetron sputtering
publisher Trans Tech Publications Ltd
publishDate 2015
url http://irep.iium.edu.my/52057/
http://irep.iium.edu.my/52057/
http://irep.iium.edu.my/52057/
http://irep.iium.edu.my/52057/1/1.pdf
first_indexed 2023-09-18T21:13:49Z
last_indexed 2023-09-18T21:13:49Z
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