Study on micro-patterning process of vertically aligned carbon nanotubes (VACNTs)
Vertically aligned carbon nanotubes (VACNTs) have drawn significant attention by the researchers because of their nanometric size and favorable material properties. Patterning of CNT forests in the micrometric domain is very important for their application in the area of microelectromechanical sys...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English English English |
| Published: |
Taylor & Francis
2016
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/50574/ http://irep.iium.edu.my/50574/ http://irep.iium.edu.my/50574/ http://irep.iium.edu.my/50574/1/Study_on_micro_patterning_process_of_vertically_aligned_carbon_nanotubes_VACNTs.pdf http://irep.iium.edu.my/50574/4/50574_Study%20on%20micro-patterning%20process%20of%20vertically%20aligned%20carbon%20nanotubes_Scopus.pdf http://irep.iium.edu.my/50574/5/50574_Study%20on%20micro-patterning%20process%20of%20vertically%20aligned%20carbon%20nanotubes_WoS.pdf |
| Summary: | Vertically aligned carbon nanotubes (VACNTs) have drawn significant attention by the researchers because
of their nanometric size and favorable material properties. Patterning of CNT forests in the micrometric
domain is very important for their application in the area of microelectromechanical system (MEMS). For
the first time this paper reports, detailed experimental investigation on a post growth m-patterning
process of VACNT forests. The micromechanical bending (M2B) process was locally applied at the targeted
area in order to change the alignment of VACNT forests. Interestingly, the VACNT forest was transformed
from typical black body absorber to reflective mirror as the M2B process was applied. Several parameters
were identified that govern the resultant patterns such as rotational spindle speed, lateral bending speed,
step size, tool morphology, and total depth of bend. Optimization of the parameters was carried out
experimentally to obtain the best surface roughness and integrity of the microstructure. A minimum
average surface roughness of Ra D 15 nm was achieved with 2000 rpm spindle speed, 1 mm/min bending
speed and 1 mm step size. |
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