Optimal design of an electrostatically actuated microbeam for maximum pull-in voltage
We consider optimizing the shape of a capacitive micro-beam for maximum pull-in voltage. The problem is discretized using finite elements. The normal flow algorithm is used to trace the nonlinear voltage displacement curve and find the pull-in point. Optimal width and thickness distributions are obt...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
2005
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/49869/ http://irep.iium.edu.my/49869/ http://irep.iium.edu.my/49869/ http://irep.iium.edu.my/49869/1/AIAA-2003-1633-871_Waleed_5.pdf http://irep.iium.edu.my/49869/4/49869.pdf |