Mechanical behavior of an electrostatically actuated micropump

We present a model of an electrostatically actuated micropump employing an annular actuating member. The boundary-value problem describing the static deflection of the plate under the electrostatic force is solved numerically. The eigenvalue problem describing the vibration of the plate around the e...

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Main Authors:	Faris, Waleed Fekry, Abdel-Rahman, Eihab M., Nayfeh, Ali H.
Format:	Conference or Workshop Item
Language:	English
Published:	2002
Subjects:	T Technology (General) T351 Mechanical drawing. Engineering graphics TJ Mechanical engineering and machinery TJ181 Mechanical movements TJ210.2 Mechanical devices and figures. Automata. Ingenious mechanism. Robots (General)
Online Access:	http://irep.iium.edu.my/49864/ http://irep.iium.edu.my/49864/ http://irep.iium.edu.my/49864/ http://irep.iium.edu.my/49864/3/49864-new.pdf

id	iium-49864
recordtype	eprints
spelling	iium-498642016-04-15T07:39:32Z http://irep.iium.edu.my/49864/ Mechanical behavior of an electrostatically actuated micropump Faris, Waleed Fekry Abdel-Rahman, Eihab M. Nayfeh, Ali H. T Technology (General) T351 Mechanical drawing. Engineering graphics TJ Mechanical engineering and machinery TJ181 Mechanical movements TJ210.2 Mechanical devices and figures. Automata. Ingenious mechanism. Robots (General) We present a model of an electrostatically actuated micropump employing an annular actuating member. The boundary-value problem describing the static deflection of the plate under the electrostatic force is solved numerically. The eigenvalue problem describing the vibration of the plate around the equilibrium position is also solved numerically for the natural frequencies and mode shapes. The results generated by our model are in good qualitative agreement with reported results for the free vibration of straight annular plates. Moreover, the relation between the maximum deflection and the intensity of the electrostatic potential is in qualitative agreement with the experimental results for micropumps with a square actuating member. The model predicts the deflection accurately for any voltage up to the pull-in voltage. 2002-04 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/49864/3/49864-new.pdf Faris, Waleed Fekry and Abdel-Rahman, Eihab M. and Nayfeh, Ali H. (2002) Mechanical behavior of an electrostatically actuated micropump. In: 43rd AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference, 22nd-25th April 2002, Denver, Colorado. http://dx.doi.org/10.2514/6.2002-1303 doi:10.2514/6.2002-1303
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	T Technology (General) T351 Mechanical drawing. Engineering graphics TJ Mechanical engineering and machinery TJ181 Mechanical movements TJ210.2 Mechanical devices and figures. Automata. Ingenious mechanism. Robots (General)
spellingShingle	T Technology (General) T351 Mechanical drawing. Engineering graphics TJ Mechanical engineering and machinery TJ181 Mechanical movements TJ210.2 Mechanical devices and figures. Automata. Ingenious mechanism. Robots (General) Faris, Waleed Fekry Abdel-Rahman, Eihab M. Nayfeh, Ali H. Mechanical behavior of an electrostatically actuated micropump
description	We present a model of an electrostatically actuated micropump employing an annular actuating member. The boundary-value problem describing the static deflection of the plate under the electrostatic force is solved numerically. The eigenvalue problem describing the vibration of the plate around the equilibrium position is also solved numerically for the natural frequencies and mode shapes. The results generated by our model are in good qualitative agreement with reported results for the free vibration of straight annular plates. Moreover, the relation between the maximum deflection and the intensity of the electrostatic potential is in qualitative agreement with the experimental results for micropumps with a square actuating member. The model predicts the deflection accurately for any voltage up to the pull-in voltage.
format	Conference or Workshop Item
author	Faris, Waleed Fekry Abdel-Rahman, Eihab M. Nayfeh, Ali H.
author_facet	Faris, Waleed Fekry Abdel-Rahman, Eihab M. Nayfeh, Ali H.
author_sort	Faris, Waleed Fekry
title	Mechanical behavior of an electrostatically actuated micropump
title_short	Mechanical behavior of an electrostatically actuated micropump
title_full	Mechanical behavior of an electrostatically actuated micropump
title_fullStr	Mechanical behavior of an electrostatically actuated micropump
title_full_unstemmed	Mechanical behavior of an electrostatically actuated micropump
title_sort	mechanical behavior of an electrostatically actuated micropump
publishDate	2002
url	http://irep.iium.edu.my/49864/ http://irep.iium.edu.my/49864/ http://irep.iium.edu.my/49864/ http://irep.iium.edu.my/49864/3/49864-new.pdf
first_indexed	2023-09-18T21:10:27Z
last_indexed	2023-09-18T21:10:27Z
_version_	1777411216832987136

Mechanical behavior of an electrostatically actuated micropump

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