Design and simulation of Clamped-Clamped and Clamped-Free resonators
To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the design of Clamped-Clamped (CC) and Clamped-Free (CF) beam resonators. These resonator...
| Main Authors: | , , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
Institute of Electrical and Electronics Engineers, Inc,
2013
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/1/49603.pdf http://irep.iium.edu.my/49603/2/49603_Design_and_Simulation_of_Clamped-Clamped_and_SCOPUS.pdf |