Design and simulation of Clamped-Clamped and Clamped-Free resonators

To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the design of Clamped-Clamped (CC) and Clamped-Free (CF) beam resonators. These resonator...

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Main Authors:	Zainuddin, Ahmad Anwar, Karim, Jamilah, Nordin, Anis Nurashikin, Pandian, Mohanraj Saundara, Khan, Sheroz
Format:	Conference or Workshop Item
Language:	English English
Published:	Institute of Electrical and Electronics Engineers, Inc, 2013
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/1/49603.pdf http://irep.iium.edu.my/49603/2/49603_Design_and_Simulation_of_Clamped-Clamped_and_SCOPUS.pdf

id	iium-49603
recordtype	eprints
spelling	iium-496032016-05-17T01:45:44Z http://irep.iium.edu.my/49603/ Design and simulation of Clamped-Clamped and Clamped-Free resonators Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Pandian, Mohanraj Saundara Khan, Sheroz TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the design of Clamped-Clamped (CC) and Clamped-Free (CF) beam resonators. These resonators provide on-chip low cost solutions for devices with much reduced chip area, besides having considerably reduced insertion losses due to nonexistent external bond wires. They can be integrated with amplifiers to form oscillators for generating clocks in the 2MHz and 20MHz range. The resonators require DC voltage maximally 10V for Clamped-Clamped and 7V for Clamped-free and 100mV AC voltage to electrostatically actuate the resonator's beams. The actuation is simulated and measured using Finite Element modeling software of COMSOL to obtain optimum design parameters. This paper makes a comparative review of different models for evaluating the designed resonator's performance in terms of resonance frequency under given pull-in voltage, and appropriate displacement. Institute of Electrical and Electronics Engineers, Inc, 2013 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/49603/1/49603.pdf application/pdf en http://irep.iium.edu.my/49603/2/49603_Design_and_Simulation_of_Clamped-Clamped_and_SCOPUS.pdf Zainuddin, Ahmad Anwar and Karim, Jamilah and Nordin, Anis Nurashikin and Pandian, Mohanraj Saundara and Khan, Sheroz (2013) Design and simulation of Clamped-Clamped and Clamped-Free resonators. In: 2013 5th Asia Symposium on Quality Electronic Design (ASQED), 26th-28th-Aug. 2013, Penang. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6643564&tag=1 10.1109/ASQED.2013.6643564
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English English
topic	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
spellingShingle	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Pandian, Mohanraj Saundara Khan, Sheroz Design and simulation of Clamped-Clamped and Clamped-Free resonators
description	To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the design of Clamped-Clamped (CC) and Clamped-Free (CF) beam resonators. These resonators provide on-chip low cost solutions for devices with much reduced chip area, besides having considerably reduced insertion losses due to nonexistent external bond wires. They can be integrated with amplifiers to form oscillators for generating clocks in the 2MHz and 20MHz range. The resonators require DC voltage maximally 10V for Clamped-Clamped and 7V for Clamped-free and 100mV AC voltage to electrostatically actuate the resonator's beams. The actuation is simulated and measured using Finite Element modeling software of COMSOL to obtain optimum design parameters. This paper makes a comparative review of different models for evaluating the designed resonator's performance in terms of resonance frequency under given pull-in voltage, and appropriate displacement.
format	Conference or Workshop Item
author	Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Pandian, Mohanraj Saundara Khan, Sheroz
author_facet	Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Pandian, Mohanraj Saundara Khan, Sheroz
author_sort	Zainuddin, Ahmad Anwar
title	Design and simulation of Clamped-Clamped and Clamped-Free resonators
title_short	Design and simulation of Clamped-Clamped and Clamped-Free resonators
title_full	Design and simulation of Clamped-Clamped and Clamped-Free resonators
title_fullStr	Design and simulation of Clamped-Clamped and Clamped-Free resonators
title_full_unstemmed	Design and simulation of Clamped-Clamped and Clamped-Free resonators
title_sort	design and simulation of clamped-clamped and clamped-free resonators
publisher	Institute of Electrical and Electronics Engineers, Inc,
publishDate	2013
url	http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/1/49603.pdf http://irep.iium.edu.my/49603/2/49603_Design_and_Simulation_of_Clamped-Clamped_and_SCOPUS.pdf
first_indexed	2023-09-18T21:10:07Z
last_indexed	2023-09-18T21:10:07Z
_version_	1777411195696840704

Design and simulation of Clamped-Clamped and Clamped-Free resonators

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