Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure
The performance of surface acoustic wave resonator in CMOS technology for single and double electrode (IDT) structure is presented. Interdigitated electrodes (IDT) structure in surface acoustic wave (SAW) resonator is the most crucial component for excitation of SAW devices. Possible configurations...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/46638/ http://irep.iium.edu.my/46638/ http://irep.iium.edu.my/46638/1/46638.pdf |