Piezoelectric characteristics of CMOS compatible AIN SAW resonators
In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AI...
| Main Authors: | , , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/45296/ http://irep.iium.edu.my/45296/ http://irep.iium.edu.my/45296/1/45296.pdf http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf |