Piezoelectric characteristics of CMOS compatible AIN SAW resonators

In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AI...

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Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Pandian, Mohanraj Saundara, Ferrer, Eloi Mariago, Song, Charlie TayWee, Shunmugam, Muniandy, Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin
Format:	Conference or Workshop Item
Language:	English English
Published:	2014
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/45296/ http://irep.iium.edu.my/45296/ http://irep.iium.edu.my/45296/1/45296.pdf http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf

id	iium-45296
recordtype	eprints
spelling	iium-452962017-09-27T04:17:32Z http://irep.iium.edu.my/45296/ Piezoelectric characteristics of CMOS compatible AIN SAW resonators Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AIN) was chosen as the piezoelectric material due to its compatibility with CMOS technology and higher phase velocity. The influences of AIN thickness on electromechanical coupling coefficient and phase velocity are discussed. High acoustic velocities (v∼5220 m/s) and coupling factors (k2∼0.19%) can be observed for SAW resonator with khAIN∼ 3.9. The measurement results are found to be consistent with FEM results with deviation less than 6% for resonance frequency and phase velocity. 2014 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/45296/1/45296.pdf application/pdf en http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Pandian, Mohanraj Saundara and Ferrer, Eloi Mariago and Song, Charlie TayWee and Shunmugam, Muniandy and Zainuddin, Ahmad Anwar and Nordin, Anis Nurashikin (2014) Piezoelectric characteristics of CMOS compatible AIN SAW resonators. In: 2014 Asia-Pacific Microwave Conference (APMC 2014), 4th-7th Nov 2014, Sendai, Japan. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7067949&tag=1
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English English
topic	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
spellingShingle	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Piezoelectric characteristics of CMOS compatible AIN SAW resonators
description	In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AIN) was chosen as the piezoelectric material due to its compatibility with CMOS technology and higher phase velocity. The influences of AIN thickness on electromechanical coupling coefficient and phase velocity are discussed. High acoustic velocities (v∼5220 m/s) and coupling factors (k2∼0.19%) can be observed for SAW resonator with khAIN∼ 3.9. The measurement results are found to be consistent with FEM results with deviation less than 6% for resonance frequency and phase velocity.
format	Conference or Workshop Item
author	Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin
author_facet	Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin
author_sort	Md Ralib @ Md Raghib, Aliza 'Aini
title	Piezoelectric characteristics of CMOS compatible AIN SAW resonators
title_short	Piezoelectric characteristics of CMOS compatible AIN SAW resonators
title_full	Piezoelectric characteristics of CMOS compatible AIN SAW resonators
title_fullStr	Piezoelectric characteristics of CMOS compatible AIN SAW resonators
title_full_unstemmed	Piezoelectric characteristics of CMOS compatible AIN SAW resonators
title_sort	piezoelectric characteristics of cmos compatible ain saw resonators
publishDate	2014
url	http://irep.iium.edu.my/45296/ http://irep.iium.edu.my/45296/ http://irep.iium.edu.my/45296/1/45296.pdf http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf
first_indexed	2023-09-18T21:04:29Z
last_indexed	2023-09-18T21:04:29Z
_version_	1777410841954484224

Piezoelectric characteristics of CMOS compatible AIN SAW resonators

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