Design, optimization and simulation of a low‑voltage shunt capacitive RF‑MEMS switch
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electromechanical system (MEMS) switch. The capacitive RF-MEMS switch is electrostatically actuated. The structure contains a coplanar waveguide, a big suspended membrane, four folded beams to support the mem...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English English |
| Published: |
Springer Berlin / Heidelberg
2015
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/45283/ http://irep.iium.edu.my/45283/ http://irep.iium.edu.my/45283/1/Microsystems_2015.pdf http://irep.iium.edu.my/45283/4/45283_Design%2C%20optimization%20and%20simulation_scopus.pdf |
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