Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor

In this paper, the fabrication of monolithic Wheatstone bridge circuit on piezoresistive microcantilever sensor is presented. The development of the device is realized through silicon micromachining technology on silicon substrate through three major fabrication steps including silicon piezoresisti...

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Main Authors:	Ab Rahim, Rosminazuin, Nordin, Anis Nurashikin, Abdul Malik, Noreha, Bais, Badariah, Majlis, Yeop Burhanuddin
Format:	Conference or Workshop Item
Language:	English English
Published:	2015
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/44490/ http://irep.iium.edu.my/44490/ http://irep.iium.edu.my/44490/ http://irep.iium.edu.my/44490/1/44490.pdf http://irep.iium.edu.my/44490/4/44490_Fabrication%20of%20monolithic%20wheatstone%20bridge_Scopus.pdf

id	iium-44490
recordtype	eprints
spelling	iium-444902018-03-06T03:28:00Z http://irep.iium.edu.my/44490/ Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor Ab Rahim, Rosminazuin Nordin, Anis Nurashikin Abdul Malik, Noreha Bais, Badariah Majlis, Yeop Burhanuddin T Technology (General) In this paper, the fabrication of monolithic Wheatstone bridge circuit on piezoresistive microcantilever sensor is presented. The development of the device is realized through silicon micromachining technology on silicon substrate through three major fabrication steps including silicon piezoresistive microcantilever formation, aluminum deposition of Wheatstone bridge interconnections and microcantilever release. The electrical discontinuity of interconnections which is one of the major issues encountered in the fabrication process is discussed and analyzed. Deposition of proper thickness of metal interconnection layers through metal evaporation process accompanied with annealing process at low temperature ensures complete electrical connections in the monolithic Wheatstone bridge configuration. Measurement of the fabricated Wheatstone bridge circuit shows a good agreement between theoretical and experimental values indicating successful fabrication of the device. Fabrication of piezoresistive microcantilever structure integrated with monolithic Wheatstone bridge circuit with resistance values in the range of 1 to 9 kΩ has been successfully realized using silicon micromachining technology. 2015 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/44490/1/44490.pdf application/pdf en http://irep.iium.edu.my/44490/4/44490_Fabrication%20of%20monolithic%20wheatstone%20bridge_Scopus.pdf Ab Rahim, Rosminazuin and Nordin, Anis Nurashikin and Abdul Malik, Noreha and Bais, Badariah and Majlis, Yeop Burhanuddin (2015) Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor. In: 2015 Symposium on Design, Integration, Test and Packaging of MEMS and MOEMS (DTIP), 27th-30th April 2015, Montpellier, France. http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7160998 10.1109/DTIP.2015.7160998
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English English
topic	T Technology (General)
spellingShingle	T Technology (General) Ab Rahim, Rosminazuin Nordin, Anis Nurashikin Abdul Malik, Noreha Bais, Badariah Majlis, Yeop Burhanuddin Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor
description	In this paper, the fabrication of monolithic Wheatstone bridge circuit on piezoresistive microcantilever sensor is presented. The development of the device is realized through silicon micromachining technology on silicon substrate through three major fabrication steps including silicon piezoresistive microcantilever formation, aluminum deposition of Wheatstone bridge interconnections and microcantilever release. The electrical discontinuity of interconnections which is one of the major issues encountered in the fabrication process is discussed and analyzed. Deposition of proper thickness of metal interconnection layers through metal evaporation process accompanied with annealing process at low temperature ensures complete electrical connections in the monolithic Wheatstone bridge configuration. Measurement of the fabricated Wheatstone bridge circuit shows a good agreement between theoretical and experimental values indicating successful fabrication of the device. Fabrication of piezoresistive microcantilever structure integrated with monolithic Wheatstone bridge circuit with resistance values in the range of 1 to 9 kΩ has been successfully realized using silicon micromachining technology.
format	Conference or Workshop Item
author	Ab Rahim, Rosminazuin Nordin, Anis Nurashikin Abdul Malik, Noreha Bais, Badariah Majlis, Yeop Burhanuddin
author_facet	Ab Rahim, Rosminazuin Nordin, Anis Nurashikin Abdul Malik, Noreha Bais, Badariah Majlis, Yeop Burhanuddin
author_sort	Ab Rahim, Rosminazuin
title	Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor
title_short	Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor
title_full	Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor
title_fullStr	Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor
title_full_unstemmed	Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor
title_sort	fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor
publishDate	2015
url	http://irep.iium.edu.my/44490/ http://irep.iium.edu.my/44490/ http://irep.iium.edu.my/44490/ http://irep.iium.edu.my/44490/1/44490.pdf http://irep.iium.edu.my/44490/4/44490_Fabrication%20of%20monolithic%20wheatstone%20bridge_Scopus.pdf
first_indexed	2023-09-18T21:03:15Z
last_indexed	2023-09-18T21:03:15Z
_version_	1777410764282265600

Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor

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