Fabrication of dual- and single-layer piezo resistive micro cantilever sensor

In this paper, the fabrication of piezoresistive microcantilever (PRM) sensor was realized through the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes, the device fabrication is realized. The fabrication of two PRM designs, dual-layer and...

Full description

Bibliographic Details
Main Authors:	Ab Rahim, Rosminazuin, Bais, Badariah, Majlis, Yeop Burhanuddin
Format:	Article
Language:	English
Published:	Asian Research Publishing Network (ARPN) 2015
Subjects:	TA168 Systems engineering
Online Access:	http://irep.iium.edu.my/44474/ http://irep.iium.edu.my/44474/ http://irep.iium.edu.my/44474/1/journal_ARPN_published.pdf

id	iium-44474
recordtype	eprints
spelling	iium-444742015-10-13T04:52:05Z http://irep.iium.edu.my/44474/ Fabrication of dual- and single-layer piezo resistive micro cantilever sensor Ab Rahim, Rosminazuin Bais, Badariah Majlis, Yeop Burhanuddin TA168 Systems engineering In this paper, the fabrication of piezoresistive microcantilever (PRM) sensor was realized through the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes, the device fabrication is realized. The fabrication of two PRM designs, dual-layer and single-layer has opened up the opportunity for device improvement especially in fabrication methods for simpler and reduced process steps. In single-layer design, the fabrication at reduced process steps which offers simpler and reproducible device has been successfully realized. This design offers simpler fabrication process by not only reducing the number of process steps but also eliminating the common fabrication issues encountered in bulk micromachining technology. With the development of single-layer doped silicon PRM sensor, the thermal strain issue, due to mismatch in coefficients of thermal expansion of multi-layered structure is not an issue. The novelty of this work lies in the design itself, in which the single-layer dual leg design not only simplifies the fabrication work, but also promotes an efficient current distribution along the piezoresistive dual-leg structure which is integrated with Wheatstone bridge configuration. Asian Research Publishing Network (ARPN) 2015-08 Article PeerReviewed application/pdf en http://irep.iium.edu.my/44474/1/journal_ARPN_published.pdf Ab Rahim, Rosminazuin and Bais, Badariah and Majlis, Yeop Burhanuddin (2015) Fabrication of dual- and single-layer piezo resistive micro cantilever sensor. ARPN Journal of Engineering and Applied Sciences, 10 (15). pp. 6274-6278. ISSN 1819-6608 http://www.arpnjournals.com/jeas/research_papers/rp_2015/jeas_0815_2401.pdf
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TA168 Systems engineering
spellingShingle	TA168 Systems engineering Ab Rahim, Rosminazuin Bais, Badariah Majlis, Yeop Burhanuddin Fabrication of dual- and single-layer piezo resistive micro cantilever sensor
description	In this paper, the fabrication of piezoresistive microcantilever (PRM) sensor was realized through the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes, the device fabrication is realized. The fabrication of two PRM designs, dual-layer and single-layer has opened up the opportunity for device improvement especially in fabrication methods for simpler and reduced process steps. In single-layer design, the fabrication at reduced process steps which offers simpler and reproducible device has been successfully realized. This design offers simpler fabrication process by not only reducing the number of process steps but also eliminating the common fabrication issues encountered in bulk micromachining technology. With the development of single-layer doped silicon PRM sensor, the thermal strain issue, due to mismatch in coefficients of thermal expansion of multi-layered structure is not an issue. The novelty of this work lies in the design itself, in which the single-layer dual leg design not only simplifies the fabrication work, but also promotes an efficient current distribution along the piezoresistive dual-leg structure which is integrated with Wheatstone bridge configuration.
format	Article
author	Ab Rahim, Rosminazuin Bais, Badariah Majlis, Yeop Burhanuddin
author_facet	Ab Rahim, Rosminazuin Bais, Badariah Majlis, Yeop Burhanuddin
author_sort	Ab Rahim, Rosminazuin
title	Fabrication of dual- and single-layer piezo resistive micro cantilever sensor
title_short	Fabrication of dual- and single-layer piezo resistive micro cantilever sensor
title_full	Fabrication of dual- and single-layer piezo resistive micro cantilever sensor
title_fullStr	Fabrication of dual- and single-layer piezo resistive micro cantilever sensor
title_full_unstemmed	Fabrication of dual- and single-layer piezo resistive micro cantilever sensor
title_sort	fabrication of dual- and single-layer piezo resistive micro cantilever sensor
publisher	Asian Research Publishing Network (ARPN)
publishDate	2015
url	http://irep.iium.edu.my/44474/ http://irep.iium.edu.my/44474/ http://irep.iium.edu.my/44474/1/journal_ARPN_published.pdf
first_indexed	2023-09-18T21:03:14Z
last_indexed	2023-09-18T21:03:14Z
_version_	1777410763143512064

Fabrication of dual- and single-layer piezo resistive micro cantilever sensor

Similar Items