Squeeze-film hydrogel deposition and dry micropatterning

In this technical note, we demonstrate a squeeze-film based spacer-free method for creating controllable submicrometer hydrogel films on planar substrates that can be used to photolithographically fabricate hydrogel microstructures. This new technique improves the photolithographic resolution and y...

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Main Authors: Ding, Zhenweng, Wan Salim, Wan Wardatul Amani, Ziaie, Babak
Format: Article
Language:English
Published: ACS Publications 2010
Subjects:
Online Access:http://irep.iium.edu.my/44324/
http://irep.iium.edu.my/44324/
http://irep.iium.edu.my/44324/
http://irep.iium.edu.my/44324/1/ding%20salim%20ziaie%202010.pdf
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spelling iium-443242017-09-15T07:30:23Z http://irep.iium.edu.my/44324/ Squeeze-film hydrogel deposition and dry micropatterning Ding, Zhenweng Wan Salim, Wan Wardatul Amani Ziaie, Babak QC Physics In this technical note, we demonstrate a squeeze-film based spacer-free method for creating controllable submicrometer hydrogel films on planar substrates that can be used to photolithographically fabricate hydrogel microstructures. This new technique improves the photolithographic resolution and yield by providing a uniform and low-defect hydrogel film. The optimum polymerization initiation time for achieving such a layer was determined to be around 1 min. For patterning, the dried hydrogel film was coated with a parylene-C masking layer. Subsequent etching in oxygen plasma was used to transfer selected patterns of hydrogel to the substrate in a batch scale. ACS Publications 2010 Article PeerReviewed application/pdf en http://irep.iium.edu.my/44324/1/ding%20salim%20ziaie%202010.pdf Ding, Zhenweng and Wan Salim, Wan Wardatul Amani and Ziaie, Babak (2010) Squeeze-film hydrogel deposition and dry micropatterning. Analytical Chemistry, 82 (8). pp. 3377-3382. ISSN 0003-2700 E-ISSN 1520-6882 http://pubs.acs.org/doi/abs/10.1021/ac100579v 10.1021/ac100579v
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic QC Physics
spellingShingle QC Physics
Ding, Zhenweng
Wan Salim, Wan Wardatul Amani
Ziaie, Babak
Squeeze-film hydrogel deposition and dry micropatterning
description In this technical note, we demonstrate a squeeze-film based spacer-free method for creating controllable submicrometer hydrogel films on planar substrates that can be used to photolithographically fabricate hydrogel microstructures. This new technique improves the photolithographic resolution and yield by providing a uniform and low-defect hydrogel film. The optimum polymerization initiation time for achieving such a layer was determined to be around 1 min. For patterning, the dried hydrogel film was coated with a parylene-C masking layer. Subsequent etching in oxygen plasma was used to transfer selected patterns of hydrogel to the substrate in a batch scale.
format Article
author Ding, Zhenweng
Wan Salim, Wan Wardatul Amani
Ziaie, Babak
author_facet Ding, Zhenweng
Wan Salim, Wan Wardatul Amani
Ziaie, Babak
author_sort Ding, Zhenweng
title Squeeze-film hydrogel deposition and dry micropatterning
title_short Squeeze-film hydrogel deposition and dry micropatterning
title_full Squeeze-film hydrogel deposition and dry micropatterning
title_fullStr Squeeze-film hydrogel deposition and dry micropatterning
title_full_unstemmed Squeeze-film hydrogel deposition and dry micropatterning
title_sort squeeze-film hydrogel deposition and dry micropatterning
publisher ACS Publications
publishDate 2010
url http://irep.iium.edu.my/44324/
http://irep.iium.edu.my/44324/
http://irep.iium.edu.my/44324/
http://irep.iium.edu.my/44324/1/ding%20salim%20ziaie%202010.pdf
first_indexed 2023-09-18T21:03:02Z
last_indexed 2023-09-18T21:03:02Z
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