Silicon compatible acoustic wave resonators: design, fabrication and performance
Continuous advancement in wireless technology and silicon microfabrication has fueled exciting growth in wireless products. The bulky size of discrete vibrating mechanical devices such as quartz crystals and surface acoustic wave resonators impedes the ultimate miniaturization of single-chip tran...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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IIUM Press
2014
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/41610/ http://irep.iium.edu.my/41610/ http://irep.iium.edu.my/41610/1/437-2144-2-PB.pdf |