Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering

Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering

This investigation deals with the effect of temperature on the optical and morphological properties of Zinc Oxide thin films prepared by radio-Frequency (RF) magnetron sputtering technique. In the present work, zinc oxide (ZnO) thin films have been deposited on glass substrates from 50°C to 300°C by...

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Main Authors: Mohamad, Souad A., Othman, Maizatulnisa
Format: Conference or Workshop Item
Language:English
English
Published: 2014
Subjects:
TK2896 Production of electricity by direct energy conversion
Online Access:http://irep.iium.edu.my/39886/
http://irep.iium.edu.my/39886/1/Effect_of_Temperature_on_the_Optical_Properties_of_ZnO_Thin_Films_Prepared_by_Sputtering_Technique.pdf
http://irep.iium.edu.my/39886/4/ICAMME_2014_Program.pdf
id iium-39886
recordtype eprints
spelling iium-398862017-02-17T22:29:34Z http://irep.iium.edu.my/39886/ Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering Mohamad, Souad A. Othman, Maizatulnisa TK2896 Production of electricity by direct energy conversion This investigation deals with the effect of temperature on the optical and morphological properties of Zinc Oxide thin films prepared by radio-Frequency (RF) magnetron sputtering technique. In the present work, zinc oxide (ZnO) thin films have been deposited on glass substrates from 50°C to 300°C by radio frequency magnetron sputtering. The effects of deposition temperature on the crystallization behaviour and optical properties of the films have been studied. The thin films were characterized using Ultraviolet Visible Spectroscopy (UV-VIS), Field Emission Scanning Electron Microscopy (FESEM) and X-ray Diffraction Analysis (XRD). From the UV-VIS testing, the average transmission percentage of the films is between 80-95% for all deposition temperatures meanwhile the energy gap of ZnO thin films varies from 3.26 eV to 3.35 eV which is not much different from the theoretical value. Also, the grain size is getting smaller from 3.886nm, 3.216nm, 3.119nm and 3.079nm with respect to the increasing deposition temperature 50°C, 100°C, 200°C and 300°C respectively whereas the average grain size per intercept value is increasing. The patterns of the peak were about the same for all deposition temperature where the thin films have polycrystalline hexagonal wurtzite structure with the orientation perpendicular (002) to the substrate surface (c-axis orientation) at 34.5(2). 2014-09-23 Conference or Workshop Item NonPeerReviewed application/pdf en http://irep.iium.edu.my/39886/1/Effect_of_Temperature_on_the_Optical_Properties_of_ZnO_Thin_Films_Prepared_by_Sputtering_Technique.pdf application/pdf en http://irep.iium.edu.my/39886/4/ICAMME_2014_Program.pdf Mohamad, Souad A. and Othman, Maizatulnisa (2014) Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering. In: International Conference on Advances in Manufacturing and Materials Engineering 2014 (ICAMME 2014), 23-25 Sep 2014, Kuala Lumpur. (Unpublished)
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
English
topic TK2896 Production of electricity by direct energy conversion
spellingShingle TK2896 Production of electricity by direct energy conversion
Mohamad, Souad A.
Othman, Maizatulnisa
Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
description This investigation deals with the effect of temperature on the optical and morphological properties of Zinc Oxide thin films prepared by radio-Frequency (RF) magnetron sputtering technique. In the present work, zinc oxide (ZnO) thin films have been deposited on glass substrates from 50°C to 300°C by radio frequency magnetron sputtering. The effects of deposition temperature on the crystallization behaviour and optical properties of the films have been studied. The thin films were characterized using Ultraviolet Visible Spectroscopy (UV-VIS), Field Emission Scanning Electron Microscopy (FESEM) and X-ray Diffraction Analysis (XRD). From the UV-VIS testing, the average transmission percentage of the films is between 80-95% for all deposition temperatures meanwhile the energy gap of ZnO thin films varies from 3.26 eV to 3.35 eV which is not much different from the theoretical value. Also, the grain size is getting smaller from 3.886nm, 3.216nm, 3.119nm and 3.079nm with respect to the increasing deposition temperature 50°C, 100°C, 200°C and 300°C respectively whereas the average grain size per intercept value is increasing. The patterns of the peak were about the same for all deposition temperature where the thin films have polycrystalline hexagonal wurtzite structure with the orientation perpendicular (002) to the substrate surface (c-axis orientation) at 34.5(2).
format Conference or Workshop Item
author Mohamad, Souad A.
Othman, Maizatulnisa
author_facet Mohamad, Souad A.
Othman, Maizatulnisa
author_sort Mohamad, Souad A.
title Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
title_short Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
title_full Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
title_fullStr Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
title_full_unstemmed Effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by RF magnetron sputtering
title_sort effect of temperature on the optical and morphological properties of zinc oxide thin films prepared by rf magnetron sputtering
publishDate 2014
url http://irep.iium.edu.my/39886/
http://irep.iium.edu.my/39886/1/Effect_of_Temperature_on_the_Optical_Properties_of_ZnO_Thin_Films_Prepared_by_Sputtering_Technique.pdf
http://irep.iium.edu.my/39886/4/ICAMME_2014_Program.pdf
first_indexed 2023-09-18T20:57:15Z
last_indexed 2023-09-18T20:57:15Z
_version_ 1777410387122061312

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