Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage

Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interfero...

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Main Authors:	Bhuiyan, Moinul, Shihab, Baten
Format:	Article
Language:	English
Published:	Springer 2014
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/1/Electrostatic_Actuator.pdf

id	iium-39442
recordtype	eprints
spelling	iium-394422018-05-24T01:48:19Z http://irep.iium.edu.my/39442/ Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage Bhuiyan, Moinul Shihab, Baten TJ Mechanical engineering and machinery Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interferometer, dynamic focus mirror, and chopper. For the fabrication, most of the cases silicon monocrystalline wafers are used through complex process. To etch the silicon substrates, researchers often use deep reactive-ion etching or anisotropic wet etching procedure which are time consuming and unsuitable for batch fabrication process. Again, resent research shows that comb-drive actuators need comparatively high voltage for actuation. In solving these problems, the study presents a copper based electrostatic micro actuator with low actuation voltage. Using wire electrical discharge machine (WEDM), the actuator is fabricated where a light weight flexible spring model is introduced. Capacitor design model is applied to present a voltage controlling electronic circuit using Arduino micro controller unit. The experimental result shows that the actuator is able to produce 1.38 mN force for 15 V DC. The experiment also proves that coper based actuator design using WEDM technology is much easier for batch processing and could provide the advantages in rapid prototyping. Springer 2014-12 Article PeerReviewed application/pdf en http://irep.iium.edu.my/39442/1/Electrostatic_Actuator.pdf Bhuiyan, Moinul and Shihab, Baten (2014) Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage. Microsystem Technologies, 20 (12). ISSN 0946-7076 (In Press) http://www.springer.com/home?SGWID=0-0-1003-0-0&aqId=2757080&download=1&checkval=eaea3bd89f7030f6f651dfde92f99900 DOI 10.1007/s00542-014-2360-z
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TJ Mechanical engineering and machinery
spellingShingle	TJ Mechanical engineering and machinery Bhuiyan, Moinul Shihab, Baten Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
description	Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interferometer, dynamic focus mirror, and chopper. For the fabrication, most of the cases silicon monocrystalline wafers are used through complex process. To etch the silicon substrates, researchers often use deep reactive-ion etching or anisotropic wet etching procedure which are time consuming and unsuitable for batch fabrication process. Again, resent research shows that comb-drive actuators need comparatively high voltage for actuation. In solving these problems, the study presents a copper based electrostatic micro actuator with low actuation voltage. Using wire electrical discharge machine (WEDM), the actuator is fabricated where a light weight flexible spring model is introduced. Capacitor design model is applied to present a voltage controlling electronic circuit using Arduino micro controller unit. The experimental result shows that the actuator is able to produce 1.38 mN force for 15 V DC. The experiment also proves that coper based actuator design using WEDM technology is much easier for batch processing and could provide the advantages in rapid prototyping.
format	Article
author	Bhuiyan, Moinul Shihab, Baten
author_facet	Bhuiyan, Moinul Shihab, Baten
author_sort	Bhuiyan, Moinul
title	Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
title_short	Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
title_full	Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
title_fullStr	Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
title_full_unstemmed	Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage
title_sort	development of copper based miniature electrostatic actuator using wedm with low actuation voltage
publisher	Springer
publishDate	2014
url	http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/1/Electrostatic_Actuator.pdf
first_indexed	2023-09-18T20:56:40Z
last_indexed	2023-09-18T20:56:40Z
_version_	1777410350068531200

Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage

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