Design and simulation of 10 MHz MEMS oscillator
Design and analysis of a 10MHz oscillator is presented. To perform oscillator circuit simulations, the CMOS-MEMS Clamped-Clamped beam) resonator structure is modeled using its RLC equivalent circuit approach. For a MEMS resonator to be able to function as an oscillator it needs to be coupled with an...
| Main Authors: | , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2014
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/39245/ http://irep.iium.edu.my/39245/ http://irep.iium.edu.my/39245/ http://irep.iium.edu.my/39245/1/06860920.pdf |