Voltage transfer analysis of sandwich coupled inductors for MEMS planar magnetic sensor
An analysis on voltage transfer characteristic of magnetically coupled sandwich inductor is presented. The aim of the study is to determine the effects of induced voltage characteristics on the gain of the transferred magnetic energy at various coil thicknesses. The induced voltage characteristics...
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| Format: | Article |
| Language: | English |
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Springer Berlin / Heidelberg
2014
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| Online Access: | http://irep.iium.edu.my/38666/ http://irep.iium.edu.my/38666/ http://irep.iium.edu.my/38666/ http://irep.iium.edu.my/38666/1/MEMS_voltage_%282014%29.pdf |
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iium-38666 |
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eprints |
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iium-386662018-06-20T00:40:47Z http://irep.iium.edu.my/38666/ Voltage transfer analysis of sandwich coupled inductors for MEMS planar magnetic sensor Yunas, Jumril Majlis, Yeop Burhanuddin Hamzah, Azrul Azlan Bais, Badariah Sulaiman, Nadzril T Technology (General) TK Electrical engineering. Electronics Nuclear engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices An analysis on voltage transfer characteristic of magnetically coupled sandwich inductor is presented. The aim of the study is to determine the effects of induced voltage characteristics on the gain of the transferred magnetic energy at various coil thicknesses. The induced voltage characteristics play an important factor in determining the efficiency of the magnetic field coupling between two separated coils of MEMS planar magnetic sensors. The output voltage response of the fabricated coupled coil was measured in the frequency range from 10 kHz up to 10 MHz using LeCroy oscilloscope at four-terminal probe station, while the resistance characteristics of the coil were measured using Agilent LCR meter for a various thicknesses of the coil structure. The measured device was fabricated using an optimized surface micromachining process. A maximum voltage gain of −0.72 dB was obtained for coil with 1.4 μm thick metal operating at 3 MHz. The results showed that there is significant dependency of coil structure, operating frequency and material parameter on the gain of the energy transferred from the excitation coil to the sensing coil which affects the sensitivity of the sensor. Springer Berlin / Heidelberg 2014-05 Article PeerReviewed application/pdf en http://irep.iium.edu.my/38666/1/MEMS_voltage_%282014%29.pdf Yunas, Jumril and Majlis, Yeop Burhanuddin and Hamzah, Azrul Azlan and Bais, Badariah and Sulaiman, Nadzril (2014) Voltage transfer analysis of sandwich coupled inductors for MEMS planar magnetic sensor. Microsystems Technologies. pp. 1-6. ISSN 1432-1858 (O), 0946-7076 (P) http://link.springer.com/article/10.1007%2Fs00542-014-2189-5 10.1007/s00542-014-2189-5 |
| repository_type |
Digital Repository |
| institution_category |
Local University |
| institution |
International Islamic University Malaysia |
| building |
IIUM Repository |
| collection |
Online Access |
| language |
English |
| topic |
T Technology (General) TK Electrical engineering. Electronics Nuclear engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices |
| spellingShingle |
T Technology (General) TK Electrical engineering. Electronics Nuclear engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Yunas, Jumril Majlis, Yeop Burhanuddin Hamzah, Azrul Azlan Bais, Badariah Sulaiman, Nadzril Voltage transfer analysis of sandwich coupled inductors for MEMS planar magnetic sensor |
| description |
An analysis on voltage transfer characteristic of
magnetically coupled sandwich inductor is presented. The
aim of the study is to determine the effects of induced voltage characteristics on the gain of the transferred magnetic energy at various coil thicknesses. The induced voltage characteristics play an important factor in determining the efficiency of the magnetic field coupling between two separated coils of MEMS planar magnetic sensors. The output voltage response of the fabricated coupled coil was measured in the frequency range from 10 kHz up to 10 MHz using LeCroy oscilloscope at four-terminal probe station, while the resistance characteristics of the coil were measured using Agilent LCR meter for a various thicknesses of the coil structure. The measured device was fabricated using an optimized surface micromachining process. A maximum voltage gain of −0.72 dB was obtained for coil with 1.4 μm thick metal operating at 3 MHz. The results showed that there is significant dependency of coil structure, operating frequency and material parameter on the gain of the energy transferred from the excitation coil to the sensing coil which affects the sensitivity of the sensor. |
| format |
Article |
| author |
Yunas, Jumril Majlis, Yeop Burhanuddin Hamzah, Azrul Azlan Bais, Badariah Sulaiman, Nadzril |
| author_facet |
Yunas, Jumril Majlis, Yeop Burhanuddin Hamzah, Azrul Azlan Bais, Badariah Sulaiman, Nadzril |
| author_sort |
Yunas, Jumril |
| title |
Voltage transfer analysis of sandwich coupled inductors
for MEMS planar magnetic sensor |
| title_short |
Voltage transfer analysis of sandwich coupled inductors
for MEMS planar magnetic sensor |
| title_full |
Voltage transfer analysis of sandwich coupled inductors
for MEMS planar magnetic sensor |
| title_fullStr |
Voltage transfer analysis of sandwich coupled inductors
for MEMS planar magnetic sensor |
| title_full_unstemmed |
Voltage transfer analysis of sandwich coupled inductors
for MEMS planar magnetic sensor |
| title_sort |
voltage transfer analysis of sandwich coupled inductors
for mems planar magnetic sensor |
| publisher |
Springer Berlin / Heidelberg |
| publishDate |
2014 |
| url |
http://irep.iium.edu.my/38666/ http://irep.iium.edu.my/38666/ http://irep.iium.edu.my/38666/ http://irep.iium.edu.my/38666/1/MEMS_voltage_%282014%29.pdf |
| first_indexed |
2023-09-18T20:55:34Z |
| last_indexed |
2023-09-18T20:55:34Z |
| _version_ |
1777410280338227200 |