µ-Patterning of Carbon Nanotube patterning of Carbon Nanotube (CNT) forest for MEMS applications
This paper proposes three new approaches for micro patterning of CNT forest in order to make it useful for MEMS based applications. The first two techniques are based on micro electro discharge machining (-EDM). However, the biggest problem associated with EDM is the spark gap which limits the st...
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| Format: | Conference or Workshop Item |
| Language: | English English |
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2013
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| Online Access: | http://irep.iium.edu.my/33410/ http://irep.iium.edu.my/33410/ http://irep.iium.edu.my/33410/1/ICOMM2013_Full_Paper_Tanveer_2105_V2.pdf http://irep.iium.edu.my/33410/4/ICOM_proof.pdf |