Design and optimization of a micro capacitive pressure sensor

The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular membrane type Micropressure sensor had been modeled using finite element package and shape optimization in order to design a more accurate flexible membrane. The results show that adding a slim wall, to...

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Main Authors:	Tahmasebpour, Kamyar, Shobaki, Mohammed M., Hrairi, Meftah
Format:	Conference or Workshop Item
Language:	English English
Published:	2013
Subjects:	TA165 Engineering instruments, meters, etc. Industrial instrumentation
Online Access:	http://irep.iium.edu.my/32171/ http://irep.iium.edu.my/32171/1/Paper_30177_-_Camera_ready.pdf http://irep.iium.edu.my/32171/4/Proceeding-CoverPage.pdf

id	iium-32171
recordtype	eprints
spelling	iium-321712014-02-18T08:06:10Z http://irep.iium.edu.my/32171/ Design and optimization of a micro capacitive pressure sensor Tahmasebpour, Kamyar Shobaki, Mohammed M. Hrairi, Meftah TA165 Engineering instruments, meters, etc. Industrial instrumentation The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular membrane type Micropressure sensor had been modeled using finite element package and shape optimization in order to design a more accurate flexible membrane. The results show that adding a slim wall, to protect the pressure sensor and system during pressure shocks, has a negligible effect on the membrane flexibility. Moreover, the simulation results show that the sensor exhibits a linear response with wide range of pressure from 0.01 MPa to 70 MPa. Furthermore, the simulation results yielded that the load-deflection responses could be enhanced using a spacer. 2013-07 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/32171/1/Paper_30177_-_Camera_ready.pdf application/pdf en http://irep.iium.edu.my/32171/4/Proceeding-CoverPage.pdf Tahmasebpour, Kamyar and Shobaki, Mohammed M. and Hrairi, Meftah (2013) Design and optimization of a micro capacitive pressure sensor. In: 2nd International Conference on Mechanical, Automotive and Aerospace Engineering (ICMAAE 2013), 2-4 July 2013, Kuala Lumpur, Malaysia.
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English English
topic	TA165 Engineering instruments, meters, etc. Industrial instrumentation
spellingShingle	TA165 Engineering instruments, meters, etc. Industrial instrumentation Tahmasebpour, Kamyar Shobaki, Mohammed M. Hrairi, Meftah Design and optimization of a micro capacitive pressure sensor
description	The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular membrane type Micropressure sensor had been modeled using finite element package and shape optimization in order to design a more accurate flexible membrane. The results show that adding a slim wall, to protect the pressure sensor and system during pressure shocks, has a negligible effect on the membrane flexibility. Moreover, the simulation results show that the sensor exhibits a linear response with wide range of pressure from 0.01 MPa to 70 MPa. Furthermore, the simulation results yielded that the load-deflection responses could be enhanced using a spacer.
format	Conference or Workshop Item
author	Tahmasebpour, Kamyar Shobaki, Mohammed M. Hrairi, Meftah
author_facet	Tahmasebpour, Kamyar Shobaki, Mohammed M. Hrairi, Meftah
author_sort	Tahmasebpour, Kamyar
title	Design and optimization of a micro capacitive pressure sensor
title_short	Design and optimization of a micro capacitive pressure sensor
title_full	Design and optimization of a micro capacitive pressure sensor
title_fullStr	Design and optimization of a micro capacitive pressure sensor
title_full_unstemmed	Design and optimization of a micro capacitive pressure sensor
title_sort	design and optimization of a micro capacitive pressure sensor
publishDate	2013
url	http://irep.iium.edu.my/32171/ http://irep.iium.edu.my/32171/1/Paper_30177_-_Camera_ready.pdf http://irep.iium.edu.my/32171/4/Proceeding-CoverPage.pdf
first_indexed	2023-09-18T20:46:26Z
last_indexed	2023-09-18T20:46:26Z
_version_	1777409705944023040

Design and optimization of a micro capacitive pressure sensor

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