Design and modelling of silicon MEMS accelerometer
In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, th...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Inderscience Publishers
2013
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/32056/ http://irep.iium.edu.my/32056/ http://irep.iium.edu.my/32056/1/IJESMS050403_HRAIRI.pdf |