Design and modelling of silicon MEMS accelerometer

Design and modelling of silicon MEMS accelerometer

In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, th...

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Main Authors: Hrairi, Meftah, Baharom, Badrul Hanafi
Format: Article
Language:English
Published: Inderscience Publishers 2013
Subjects:
TJ181 Mechanical movements
Online Access:http://irep.iium.edu.my/32056/
http://irep.iium.edu.my/32056/
http://irep.iium.edu.my/32056/1/IJESMS050403_HRAIRI.pdf
id iium-32056
recordtype eprints
spelling iium-320562015-12-18T12:21:52Z http://irep.iium.edu.my/32056/ Design and modelling of silicon MEMS accelerometer Hrairi, Meftah Baharom, Badrul Hanafi TJ181 Mechanical movements In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modelling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications. Inderscience Publishers 2013 Article PeerReviewed application/pdf en http://irep.iium.edu.my/32056/1/IJESMS050403_HRAIRI.pdf Hrairi, Meftah and Baharom, Badrul Hanafi (2013) Design and modelling of silicon MEMS accelerometer. International Journal of Engineering Systems Modelling and Simulation, 5 (4). pp. 181-187. ISSN 1755-9766 http://www.inderscience.com/info/ingeneral/forthcoming.php?jcode=ijesms
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TJ181 Mechanical movements
spellingShingle TJ181 Mechanical movements
Hrairi, Meftah
Baharom, Badrul Hanafi
Design and modelling of silicon MEMS accelerometer
description In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modelling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications.
format Article
author Hrairi, Meftah
Baharom, Badrul Hanafi
author_facet Hrairi, Meftah
Baharom, Badrul Hanafi
author_sort Hrairi, Meftah
title Design and modelling of silicon MEMS accelerometer
title_short Design and modelling of silicon MEMS accelerometer
title_full Design and modelling of silicon MEMS accelerometer
title_fullStr Design and modelling of silicon MEMS accelerometer
title_full_unstemmed Design and modelling of silicon MEMS accelerometer
title_sort design and modelling of silicon mems accelerometer
publisher Inderscience Publishers
publishDate 2013
url http://irep.iium.edu.my/32056/
http://irep.iium.edu.my/32056/
http://irep.iium.edu.my/32056/1/IJESMS050403_HRAIRI.pdf
first_indexed 2023-09-18T20:46:15Z
last_indexed 2023-09-18T20:46:15Z
_version_ 1777409694665539584

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