Modelling for fabrication of microelectrodes by localized electrochemical deposition for micro-electrodischarge machining
This paper presents the theoretical modelling and experimental investigation on the effect of different localized electrochemical deposition (LECD) parameters for fabricating a variety of microstructures. In order to estimate the rate of the deposition and the condition of the deposited structure...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publications Inc.
2010
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/30945/ http://irep.iium.edu.my/30945/ http://irep.iium.edu.my/30945/ http://irep.iium.edu.my/30945/1/IME_ECD.pdf |
| Summary: | This paper presents the theoretical modelling and experimental investigation on
the effect of different localized electrochemical deposition (LECD) parameters for fabricating a
variety of microstructures. In order to estimate the rate of the deposition and the condition of the
deposited structure, a set of mathematical relations is developed with the help of Faraday’s laws
of electrolysis and the Butler–Volmer equation. Mathematical simulation results are validated by
experimental results. In this experimental process copper was deposited on the cathode surface.
The variation in structure of the deposited electrode is achieved by changing the shape of a nonconductive
mask. Thismaskis fabricated by an on-machine micromilling processandit is kept in
contact with the cathode surface. The whole system is immersed in an acidified copper sulphate
plating solution. This study gives a clear indication of the optimized operating range for theLECD
process in order to fabricate high aspect ratio microstructures. Futhermore, the performance of
the LECD electrode is evaluated by the fabrication of microholes on high-melting-point material
such as a stainless steel workpiece. |
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