High-precision dry micro-electro-discharge machining of Carbon-Nanotube forests with ultralow discharge energy
This work investigates reverse-polarity dry microelectro- discharge machining (μEDM) of pure carbonnanotube (CNT) forests that are used as cathodes in the process, as opposed to conventional μEDM where the material to be machined forms the anode. The new configuration with the reversed polarity...
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| Format: | Conference or Workshop Item |
| Language: | English |
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2012
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| Online Access: | http://irep.iium.edu.my/30325/ http://irep.iium.edu.my/30325/1/Published.pdf |
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iium-30325 |
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eprints |
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iium-303252013-09-11T04:48:07Z http://irep.iium.edu.my/30325/ High-precision dry micro-electro-discharge machining of Carbon-Nanotube forests with ultralow discharge energy Saleh, Tanveer TA2001 Plasma engineering. Applied plasma dynamics This work investigates reverse-polarity dry microelectro- discharge machining (μEDM) of pure carbonnanotube (CNT) forests that are used as cathodes in the process, as opposed to conventional μEDM where the material to be machined forms the anode. The new configuration with the reversed polarity is observed to generate higher discharge currents, most likely due to effective field-emission from CNTs. This effect allows the process to be performed at very low discharge energies, ~80× smaller than in the conventional normal-polarity case, with the machining voltage and tolerance down to 10 V and 2.5 μm, respectively, enabling high-precision high-aspect-ratio micropatterning in the forests. 2012 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/30325/1/Published.pdf Saleh, Tanveer (2012) High-precision dry micro-electro-discharge machining of Carbon-Nanotube forests with ultralow discharge energy. In: International Conference on Micro Electro Mechanical Systems (MEMS), 29 Jan - 2 Feb 2012, Paris. |
| repository_type |
Digital Repository |
| institution_category |
Local University |
| institution |
International Islamic University Malaysia |
| building |
IIUM Repository |
| collection |
Online Access |
| language |
English |
| topic |
TA2001 Plasma engineering. Applied plasma dynamics |
| spellingShingle |
TA2001 Plasma engineering. Applied plasma dynamics Saleh, Tanveer High-precision dry micro-electro-discharge machining of Carbon-Nanotube forests with ultralow discharge energy |
| description |
This work investigates reverse-polarity dry microelectro-
discharge machining (μEDM) of pure carbonnanotube
(CNT) forests that are used as cathodes in the
process, as opposed to conventional μEDM where the
material to be machined forms the anode. The new
configuration with the reversed polarity is observed to
generate higher discharge currents, most likely due to
effective field-emission from CNTs. This effect allows the
process to be performed at very low discharge energies,
~80× smaller than in the conventional normal-polarity
case, with the machining voltage and tolerance down to
10 V and 2.5 μm, respectively, enabling high-precision
high-aspect-ratio micropatterning in the forests. |
| format |
Conference or Workshop Item |
| author |
Saleh, Tanveer |
| author_facet |
Saleh, Tanveer |
| author_sort |
Saleh, Tanveer |
| title |
High-precision dry micro-electro-discharge machining of
Carbon-Nanotube forests with ultralow discharge energy |
| title_short |
High-precision dry micro-electro-discharge machining of
Carbon-Nanotube forests with ultralow discharge energy |
| title_full |
High-precision dry micro-electro-discharge machining of
Carbon-Nanotube forests with ultralow discharge energy |
| title_fullStr |
High-precision dry micro-electro-discharge machining of
Carbon-Nanotube forests with ultralow discharge energy |
| title_full_unstemmed |
High-precision dry micro-electro-discharge machining of
Carbon-Nanotube forests with ultralow discharge energy |
| title_sort |
high-precision dry micro-electro-discharge machining of
carbon-nanotube forests with ultralow discharge energy |
| publishDate |
2012 |
| url |
http://irep.iium.edu.my/30325/ http://irep.iium.edu.my/30325/1/Published.pdf |
| first_indexed |
2023-09-18T20:44:28Z |
| last_indexed |
2023-09-18T20:44:28Z |
| _version_ |
1777409582314815488 |