High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator

High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator

A forest of vertically aligned carbon nanotubes (CNTs) is integrated as an electrical contact material with a high-power, normally-open switch based on micro-electro-mechanical systems (MEMS) technology. A shape-memory-alloy (SMA) cantilever is thermally actuated to enable switching between the...

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Main Authors: Dahmardeh, Masoud, Mohamed Ali, Mohamed Sultan, Saleh, Tanveer, Min Hian, Tee, Moghaddam, Mehran Vahdani, Nojeh, Alireza, Takahata, Kenichi
Format: Article
Language:English
Published: Wiley-VCH Verlag 2013
Subjects:
TJ212 Control engineering
Online Access:http://irep.iium.edu.my/30324/
http://irep.iium.edu.my/30324/
http://irep.iium.edu.my/30324/
http://irep.iium.edu.my/30324/1/SMA_Cantilever_Switch.pdf
id iium-30324
recordtype eprints
spelling iium-303242013-08-28T04:46:01Z http://irep.iium.edu.my/30324/ High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator Dahmardeh, Masoud Mohamed Ali, Mohamed Sultan Saleh, Tanveer Min Hian, Tee Moghaddam, Mehran Vahdani Nojeh, Alireza Takahata, Kenichi TJ212 Control engineering A forest of vertically aligned carbon nanotubes (CNTs) is integrated as an electrical contact material with a high-power, normally-open switch based on micro-electro-mechanical systems (MEMS) technology. A shape-memory-alloy (SMA) cantilever is thermally actuated to enable switching between the movable CNT forest and the copper electrode formed on the SMA. The out-of-plane SMA actuator provides high forces to enable distributed contacts with the CNT forest, achieving low contact resistances and high ON/OFF resistance ratios. The ON state of the switch shows contact resistances as low as 35Vwith a dependence on the operating current. The device operation is performed with over 5-W input powers. Long-term operation with more than 1�106 switching cycles is demonstrated. The results indicate that a combination of the CNT-based contact and the SMA actuator may be a promising path to realizing reliable MEMS contact switches for high-power applications. Wiley-VCH Verlag 2013-04 Article PeerReviewed application/pdf en http://irep.iium.edu.my/30324/1/SMA_Cantilever_Switch.pdf Dahmardeh, Masoud and Mohamed Ali, Mohamed Sultan and Saleh, Tanveer and Min Hian, Tee and Moghaddam, Mehran Vahdani and Nojeh, Alireza and Takahata, Kenichi (2013) High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator. Physica Status Solidi (A) Applications and Materials, 210 (4). pp. 631-638. ISSN 1862-6300 http://onlinelibrary.wiley.com/doi/10.1002/pssa.201228678/abstract 10.1002/pssa.201228678
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TJ212 Control engineering
spellingShingle TJ212 Control engineering
Dahmardeh, Masoud
Mohamed Ali, Mohamed Sultan
Saleh, Tanveer
Min Hian, Tee
Moghaddam, Mehran Vahdani
Nojeh, Alireza
Takahata, Kenichi
High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator
description A forest of vertically aligned carbon nanotubes (CNTs) is integrated as an electrical contact material with a high-power, normally-open switch based on micro-electro-mechanical systems (MEMS) technology. A shape-memory-alloy (SMA) cantilever is thermally actuated to enable switching between the movable CNT forest and the copper electrode formed on the SMA. The out-of-plane SMA actuator provides high forces to enable distributed contacts with the CNT forest, achieving low contact resistances and high ON/OFF resistance ratios. The ON state of the switch shows contact resistances as low as 35Vwith a dependence on the operating current. The device operation is performed with over 5-W input powers. Long-term operation with more than 1�106 switching cycles is demonstrated. The results indicate that a combination of the CNT-based contact and the SMA actuator may be a promising path to realizing reliable MEMS contact switches for high-power applications.
format Article
author Dahmardeh, Masoud
Mohamed Ali, Mohamed Sultan
Saleh, Tanveer
Min Hian, Tee
Moghaddam, Mehran Vahdani
Nojeh, Alireza
Takahata, Kenichi
author_facet Dahmardeh, Masoud
Mohamed Ali, Mohamed Sultan
Saleh, Tanveer
Min Hian, Tee
Moghaddam, Mehran Vahdani
Nojeh, Alireza
Takahata, Kenichi
author_sort Dahmardeh, Masoud
title High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator
title_short High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator
title_full High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator
title_fullStr High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator
title_full_unstemmed High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator
title_sort high-power mems switch enabled by carbon-nanotube contact and shape-memory-alloy actuator
publisher Wiley-VCH Verlag
publishDate 2013
url http://irep.iium.edu.my/30324/
http://irep.iium.edu.my/30324/
http://irep.iium.edu.my/30324/
http://irep.iium.edu.my/30324/1/SMA_Cantilever_Switch.pdf
first_indexed 2023-09-18T20:44:28Z
last_indexed 2023-09-18T20:44:28Z
_version_ 1777409582170112000

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