Theoretical design of CMOS SAW resonator

Traditionally, surface acoustic wave (SAW) resonators are key components in transceiver systems. SAW devices can act as high pass or low filters, high quality resonators and are usually fabricated on piezoelectric substrates such as quartz or lithium niobate. Recently, there has been interest to des...

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Main Authors: Soeroso, Iksannurazmi Bambang, Nordin, Anis Nurashikin
Format: Conference or Workshop Item
Language:English
Published: 2012
Subjects:
Online Access:http://irep.iium.edu.my/29299/
http://irep.iium.edu.my/29299/1/Theoretical_Design_of_CMOS_SAW_Resonator.pdf
id iium-29299
recordtype eprints
spelling iium-292992013-02-27T23:53:21Z http://irep.iium.edu.my/29299/ Theoretical design of CMOS SAW resonator Soeroso, Iksannurazmi Bambang Nordin, Anis Nurashikin TK7885 Computer engineering Traditionally, surface acoustic wave (SAW) resonators are key components in transceiver systems. SAW devices can act as high pass or low filters, high quality resonators and are usually fabricated on piezoelectric substrates such as quartz or lithium niobate. Recently, there has been interest to design the SAW devices using complementary metal-oxide semiconductor (CMOS) or integrated circuit fabrication techniques. This allows the SAW device to be integrated with circuits, yielding low cost and small device size. Generally, a separate deposition steps is being used to implement resonator's interdigital fingers (IDT). This work presents the theoretical model of a SAW resonator designed in CMOS technology. The device will be designed to minimize losses due to the piezoelectric material and to achieve high quality factors. Critical device parameters such as periodic spacing, number of transducers and reflectors are calculated based on the device's design equations. The admittance and frequency response of the device is also modeled based on the theoretical equations. 2012 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/29299/1/Theoretical_Design_of_CMOS_SAW_Resonator.pdf Soeroso, Iksannurazmi Bambang and Nordin, Anis Nurashikin (2012) Theoretical design of CMOS SAW resonator. In: International Conference on Computer and Communication Engineering (ICCCE 2012), 3-5 July 2012, Seri Pacific Hotel Kuala Lumpur.
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TK7885 Computer engineering
spellingShingle TK7885 Computer engineering
Soeroso, Iksannurazmi Bambang
Nordin, Anis Nurashikin
Theoretical design of CMOS SAW resonator
description Traditionally, surface acoustic wave (SAW) resonators are key components in transceiver systems. SAW devices can act as high pass or low filters, high quality resonators and are usually fabricated on piezoelectric substrates such as quartz or lithium niobate. Recently, there has been interest to design the SAW devices using complementary metal-oxide semiconductor (CMOS) or integrated circuit fabrication techniques. This allows the SAW device to be integrated with circuits, yielding low cost and small device size. Generally, a separate deposition steps is being used to implement resonator's interdigital fingers (IDT). This work presents the theoretical model of a SAW resonator designed in CMOS technology. The device will be designed to minimize losses due to the piezoelectric material and to achieve high quality factors. Critical device parameters such as periodic spacing, number of transducers and reflectors are calculated based on the device's design equations. The admittance and frequency response of the device is also modeled based on the theoretical equations.
format Conference or Workshop Item
author Soeroso, Iksannurazmi Bambang
Nordin, Anis Nurashikin
author_facet Soeroso, Iksannurazmi Bambang
Nordin, Anis Nurashikin
author_sort Soeroso, Iksannurazmi Bambang
title Theoretical design of CMOS SAW resonator
title_short Theoretical design of CMOS SAW resonator
title_full Theoretical design of CMOS SAW resonator
title_fullStr Theoretical design of CMOS SAW resonator
title_full_unstemmed Theoretical design of CMOS SAW resonator
title_sort theoretical design of cmos saw resonator
publishDate 2012
url http://irep.iium.edu.my/29299/
http://irep.iium.edu.my/29299/1/Theoretical_Design_of_CMOS_SAW_Resonator.pdf
first_indexed 2023-09-18T20:42:59Z
last_indexed 2023-09-18T20:42:59Z
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