Theoretical design of CMOS SAW resonator
Traditionally, surface acoustic wave (SAW) resonators are key components in transceiver systems. SAW devices can act as high pass or low filters, high quality resonators and are usually fabricated on piezoelectric substrates such as quartz or lithium niobate. Recently, there has been interest to des...
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iium-292992013-02-27T23:53:21Z http://irep.iium.edu.my/29299/ Theoretical design of CMOS SAW resonator Soeroso, Iksannurazmi Bambang Nordin, Anis Nurashikin TK7885 Computer engineering Traditionally, surface acoustic wave (SAW) resonators are key components in transceiver systems. SAW devices can act as high pass or low filters, high quality resonators and are usually fabricated on piezoelectric substrates such as quartz or lithium niobate. Recently, there has been interest to design the SAW devices using complementary metal-oxide semiconductor (CMOS) or integrated circuit fabrication techniques. This allows the SAW device to be integrated with circuits, yielding low cost and small device size. Generally, a separate deposition steps is being used to implement resonator's interdigital fingers (IDT). This work presents the theoretical model of a SAW resonator designed in CMOS technology. The device will be designed to minimize losses due to the piezoelectric material and to achieve high quality factors. Critical device parameters such as periodic spacing, number of transducers and reflectors are calculated based on the device's design equations. The admittance and frequency response of the device is also modeled based on the theoretical equations. 2012 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/29299/1/Theoretical_Design_of_CMOS_SAW_Resonator.pdf Soeroso, Iksannurazmi Bambang and Nordin, Anis Nurashikin (2012) Theoretical design of CMOS SAW resonator. In: International Conference on Computer and Communication Engineering (ICCCE 2012), 3-5 July 2012, Seri Pacific Hotel Kuala Lumpur. |
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TK7885 Computer engineering |
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TK7885 Computer engineering Soeroso, Iksannurazmi Bambang Nordin, Anis Nurashikin Theoretical design of CMOS SAW resonator |
description |
Traditionally, surface acoustic wave (SAW) resonators are key components in transceiver systems. SAW devices can act as high pass or low filters, high quality resonators and are usually fabricated on piezoelectric substrates such as quartz or lithium niobate. Recently, there has been interest to design the SAW devices using complementary metal-oxide semiconductor (CMOS) or integrated circuit fabrication techniques. This allows the SAW device to be integrated with circuits, yielding low cost and small device size. Generally, a separate deposition steps is being used to implement resonator's interdigital fingers (IDT). This work presents the theoretical model of a SAW resonator designed in CMOS technology. The device will be designed to minimize losses due to the piezoelectric material and to achieve high quality factors. Critical device parameters such as periodic spacing, number of transducers and reflectors are calculated based on the device's design equations. The admittance and frequency response of the device is also modeled based on the theoretical equations. |
format |
Conference or Workshop Item |
author |
Soeroso, Iksannurazmi Bambang Nordin, Anis Nurashikin |
author_facet |
Soeroso, Iksannurazmi Bambang Nordin, Anis Nurashikin |
author_sort |
Soeroso, Iksannurazmi Bambang |
title |
Theoretical design of CMOS SAW resonator |
title_short |
Theoretical design of CMOS SAW resonator |
title_full |
Theoretical design of CMOS SAW resonator |
title_fullStr |
Theoretical design of CMOS SAW resonator |
title_full_unstemmed |
Theoretical design of CMOS SAW resonator |
title_sort |
theoretical design of cmos saw resonator |
publishDate |
2012 |
url |
http://irep.iium.edu.my/29299/ http://irep.iium.edu.my/29299/1/Theoretical_Design_of_CMOS_SAW_Resonator.pdf |
first_indexed |
2023-09-18T20:42:59Z |
last_indexed |
2023-09-18T20:42:59Z |
_version_ |
1777409489559879680 |