Geometrical integrity of microholes produced by micro-EDM
Although there are many techniques for the fabrication of micro-hole for Bio-MEMS and microfludic applications, characterization of high aspect ratio (depth/diameter) micro-hole is a critical issue among the researchers worldwide. The characteristics such as surface finish, vertical side wall, et...
| Main Author: | |
|---|---|
| Format: | Monograph |
| Language: | English |
| Published: |
Research Management Center, IIUM
2008
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/28924/ http://irep.iium.edu.my/28924/ http://irep.iium.edu.my/28924/1/098_EDW-17_2008_Full_report.pdf |