Micro-drilling of metallic materials for microsystems technology
This research project focused on the use of micro-EDM to create micro-holes with different aspect ratio (depth/diameter). It examined the influence of various factors on the final accuracy in EDM micro drilling. In particular, the main parameters affecting the aspect ratio, vertical side wall, si...
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| Format: | Monograph |
| Language: | English |
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Research Management Center, IIUM
2008
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| Online Access: | http://irep.iium.edu.my/28923/ http://irep.iium.edu.my/28923/ http://irep.iium.edu.my/28923/1/097_EDW-18_2008_Full_report.pdf |
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iium-28923 |
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eprints |
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iium-289232013-11-14T00:50:05Z http://irep.iium.edu.my/28923/ Micro-drilling of metallic materials for microsystems technology Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures This research project focused on the use of micro-EDM to create micro-holes with different aspect ratio (depth/diameter). It examined the influence of various factors on the final accuracy in EDM micro drilling. In particular, the main parameters affecting the aspect ratio, vertical side wall, size and position of the hole were investigated. Beryllium copper which is widely used for the fabrication of microcavity for MEMS replication was used as substrate. The drilled holes are useful in Bio-MEMS and microfludic analysis. Research Management Center, IIUM 2008-01 Monograph NonPeerReviewed application/pdf en http://irep.iium.edu.my/28923/1/097_EDW-18_2008_Full_report.pdf Ali, Mohammad Yeakub (2008) Micro-drilling of metallic materials for microsystems technology. Project Report. Research Management Center, IIUM, Kuala Lumpur. (Unpublished) EDW A06-18 |
| repository_type |
Digital Repository |
| institution_category |
Local University |
| institution |
International Islamic University Malaysia |
| building |
IIUM Repository |
| collection |
Online Access |
| language |
English |
| topic |
TJ Mechanical engineering and machinery TS Manufactures |
| spellingShingle |
TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Micro-drilling of metallic materials for microsystems technology |
| description |
This research project focused on the use of micro-EDM to create micro-holes with
different aspect ratio (depth/diameter). It examined the influence of various factors on
the final accuracy in EDM micro drilling. In particular, the main parameters affecting
the aspect ratio, vertical side wall, size and position of the hole were investigated.
Beryllium copper which is widely used for the fabrication of microcavity for MEMS
replication was used as substrate. The drilled holes are useful in Bio-MEMS and
microfludic analysis. |
| format |
Monograph |
| author |
Ali, Mohammad Yeakub |
| author_facet |
Ali, Mohammad Yeakub |
| author_sort |
Ali, Mohammad Yeakub |
| title |
Micro-drilling of metallic materials for microsystems technology |
| title_short |
Micro-drilling of metallic materials for microsystems technology |
| title_full |
Micro-drilling of metallic materials for microsystems technology |
| title_fullStr |
Micro-drilling of metallic materials for microsystems technology |
| title_full_unstemmed |
Micro-drilling of metallic materials for microsystems technology |
| title_sort |
micro-drilling of metallic materials for microsystems technology |
| publisher |
Research Management Center, IIUM |
| publishDate |
2008 |
| url |
http://irep.iium.edu.my/28923/ http://irep.iium.edu.my/28923/ http://irep.iium.edu.my/28923/1/097_EDW-18_2008_Full_report.pdf |
| first_indexed |
2023-09-18T20:42:29Z |
| last_indexed |
2023-09-18T20:42:29Z |
| _version_ |
1777409457807949824 |