Micro-drilling of metallic materials for microsystems technology
This research project focused on the use of micro-EDM to create micro-holes with different aspect ratio (depth/diameter). It examined the influence of various factors on the final accuracy in EDM micro drilling. In particular, the main parameters affecting the aspect ratio, vertical side wall, si...
| Main Author: | |
|---|---|
| Format: | Monograph |
| Language: | English |
| Published: |
Research Management Center, IIUM
2008
|
| Subjects: | |
| Online Access: | http://irep.iium.edu.my/28923/ http://irep.iium.edu.my/28923/ http://irep.iium.edu.my/28923/1/097_EDW-18_2008_Full_report.pdf |
| Summary: | This research project focused on the use of micro-EDM to create micro-holes with
different aspect ratio (depth/diameter). It examined the influence of various factors on
the final accuracy in EDM micro drilling. In particular, the main parameters affecting
the aspect ratio, vertical side wall, size and position of the hole were investigated.
Beryllium copper which is widely used for the fabrication of microcavity for MEMS
replication was used as substrate. The drilled holes are useful in Bio-MEMS and
microfludic analysis. |
|---|