Development of micro end milling process for fabricating MEMS

The influences of selected micro end milling cutting parameters on surface roughness were studied on beryllium copper alloy and PMMA (poly-methyl-methacrylate). A number of microchannels were fabricated in order to characterize the process parameters influencing surface roughness. Two-level four-fac...

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Main Author:	Ali, Mohammad Yeakub
Format:	Monograph
Language:	English
Published:	International Islamic University Malaysia 2009
Subjects:	TJ Mechanical engineering and machinery TS Manufactures
Online Access:	http://irep.iium.edu.my/28922/ http://irep.iium.edu.my/28922/ http://irep.iium.edu.my/28922/1/096_IFRG0701-06_2009_Full_Report.pdf

id	iium-28922
recordtype	eprints
spelling	iium-289222014-03-17T02:38:31Z http://irep.iium.edu.my/28922/ Development of micro end milling process for fabricating MEMS Ali, Mohammad Yeakub TJ Mechanical engineering and machinery TS Manufactures The influences of selected micro end milling cutting parameters on surface roughness were studied on beryllium copper alloy and PMMA (poly-methyl-methacrylate). A number of microchannels were fabricated in order to characterize the process parameters influencing surface roughness. Two-level four-factor statistical models were developed to predict the average (Ra) and peak-to-valley (Rt) surface roughness for beryllium copper alloy. Relationship of cutting speed and feed rate on surface roughness of PMMA were plotted and analyzed. Experiments were conducted with four process parameters: feed rate, depth of cut, cutting speed and tool diameter. The interaction effect of parameters was studied. Both Ra and Rt were found strongly influenced by feed per tooth, depth of cut and tool diameter. An average surface roughness of 0.30 μm for beryllium copper and 3.46 μm was observed. Furthermore, the burr height formed during machining is in the range of 15-55 μm. Burr height formation of machined microchannel was increasing proportionally with respect to cutting speeds and feed per tooth. Therefore, of low cutting speed and feed per tooth is used in microchannel fabrication to minimize the burr height. International Islamic University Malaysia 2009 Monograph NonPeerReviewed application/pdf en http://irep.iium.edu.my/28922/1/096_IFRG0701-06_2009_Full_Report.pdf Ali, Mohammad Yeakub (2009) Development of micro end milling process for fabricating MEMS. Research Report. International Islamic University Malaysia, Kuala Lumpur. (Unpublished) FRG 0701 - 06
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TJ Mechanical engineering and machinery TS Manufactures
spellingShingle	TJ Mechanical engineering and machinery TS Manufactures Ali, Mohammad Yeakub Development of micro end milling process for fabricating MEMS
description	The influences of selected micro end milling cutting parameters on surface roughness were studied on beryllium copper alloy and PMMA (poly-methyl-methacrylate). A number of microchannels were fabricated in order to characterize the process parameters influencing surface roughness. Two-level four-factor statistical models were developed to predict the average (Ra) and peak-to-valley (Rt) surface roughness for beryllium copper alloy. Relationship of cutting speed and feed rate on surface roughness of PMMA were plotted and analyzed. Experiments were conducted with four process parameters: feed rate, depth of cut, cutting speed and tool diameter. The interaction effect of parameters was studied. Both Ra and Rt were found strongly influenced by feed per tooth, depth of cut and tool diameter. An average surface roughness of 0.30 μm for beryllium copper and 3.46 μm was observed. Furthermore, the burr height formed during machining is in the range of 15-55 μm. Burr height formation of machined microchannel was increasing proportionally with respect to cutting speeds and feed per tooth. Therefore, of low cutting speed and feed per tooth is used in microchannel fabrication to minimize the burr height.
format	Monograph
author	Ali, Mohammad Yeakub
author_facet	Ali, Mohammad Yeakub
author_sort	Ali, Mohammad Yeakub
title	Development of micro end milling process for fabricating MEMS
title_short	Development of micro end milling process for fabricating MEMS
title_full	Development of micro end milling process for fabricating MEMS
title_fullStr	Development of micro end milling process for fabricating MEMS
title_full_unstemmed	Development of micro end milling process for fabricating MEMS
title_sort	development of micro end milling process for fabricating mems
publisher	International Islamic University Malaysia
publishDate	2009
url	http://irep.iium.edu.my/28922/ http://irep.iium.edu.my/28922/ http://irep.iium.edu.my/28922/1/096_IFRG0701-06_2009_Full_Report.pdf
first_indexed	2023-09-18T20:42:29Z
last_indexed	2023-09-18T20:42:29Z
_version_	1777409457674780672

Development of micro end milling process for fabricating MEMS

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