Surface roughness of FIB sputtered silicon
Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution,...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
Kluwer Academic Publishers (Springer)
2001
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/28903/ http://irep.iium.edu.my/28903/1/surface_of_roughness.pdf |