APA (7th ed.) Citation

Ali, M. Y., Hung, N. P., Yuan, S., & Inasaki, I. (2001). Surface roughness of FIB sputtered silicon. Kluwer Academic Publishers (Springer).

Chicago Style (17th ed.) Citation

Ali, Mohammad Yeakub, N. P. Hung, S. Yuan, and Ichiro Inasaki. Surface Roughness of FIB Sputtered Silicon. Kluwer Academic Publishers (Springer), 2001.

MLA (8th ed.) Citation

Ali, Mohammad Yeakub, et al. Surface Roughness of FIB Sputtered Silicon. Kluwer Academic Publishers (Springer), 2001.