Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power

ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF powe...

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Main Authors:	Muhamad Suki, Nur Sa'adah, Herman, Sukreen Hana, Ani, Mohd Hanafi, Mahmood, Mohamad Rusop
Format:	Article
Language:	English
Published:	Trans Tech Publications, Switzerland 2012
Subjects:	TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://irep.iium.edu.my/27469/ http://irep.iium.edu.my/27469/ http://irep.iium.edu.my/27469/ http://irep.iium.edu.my/27469/1/Structural_properties_of_deposited_ZnO_thin_films_on_flexible_substrate_at_various_substrate_temperatures_and_Rf_power.pdf

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recordtype	eprints
spelling	iium-274692013-02-19T02:39:42Z http://irep.iium.edu.my/27469/ Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power Muhamad Suki, Nur Sa'adah Herman, Sukreen Hana Ani, Mohd Hanafi Mahmood, Mohamad Rusop TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF power. It is observed that the deposition rate increased as the temperature and RF power increased. FE-SEM images confirmed that microstructure of the thin films consists of nanoparticles. XRD data confirmed that the ZnO thin films at various RF power and substrate temperature have (002) structure. Trans Tech Publications, Switzerland 2012 Article PeerReviewed application/pdf en http://irep.iium.edu.my/27469/1/Structural_properties_of_deposited_ZnO_thin_films_on_flexible_substrate_at_various_substrate_temperatures_and_Rf_power.pdf Muhamad Suki, Nur Sa'adah and Herman, Sukreen Hana and Ani, Mohd Hanafi and Mahmood, Mohamad Rusop (2012) Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power. Advanced Materials Research, 576 (2012). pp. 598-601. ISSN 1022-6680 http://www.scientific.net/AMR.576.598 10.4028/www.scientific.net/AMR.576.598
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering
spellingShingle	TA Engineering (General). Civil engineering (General) TK Electrical engineering. Electronics Nuclear engineering Muhamad Suki, Nur Sa'adah Herman, Sukreen Hana Ani, Mohd Hanafi Mahmood, Mohamad Rusop Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power
description	ZnO thin films were deposited on Teflon substrates by RF magnetron sputtering at different substrate temperature and different RF power. In this work, we investigated the dependence of the deposition rate and also the ZnO physical and electrical properties on the substrate temperature and RF power. It is observed that the deposition rate increased as the temperature and RF power increased. FE-SEM images confirmed that microstructure of the thin films consists of nanoparticles. XRD data confirmed that the ZnO thin films at various RF power and substrate temperature have (002) structure.
format	Article
author	Muhamad Suki, Nur Sa'adah Herman, Sukreen Hana Ani, Mohd Hanafi Mahmood, Mohamad Rusop
author_facet	Muhamad Suki, Nur Sa'adah Herman, Sukreen Hana Ani, Mohd Hanafi Mahmood, Mohamad Rusop
author_sort	Muhamad Suki, Nur Sa'adah
title	Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power
title_short	Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power
title_full	Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power
title_fullStr	Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power
title_full_unstemmed	Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power
title_sort	structural properties of deposited zno thin films on flexible substrates at various substrate temperatures and rf power
publisher	Trans Tech Publications, Switzerland
publishDate	2012
url	http://irep.iium.edu.my/27469/ http://irep.iium.edu.my/27469/ http://irep.iium.edu.my/27469/ http://irep.iium.edu.my/27469/1/Structural_properties_of_deposited_ZnO_thin_films_on_flexible_substrate_at_various_substrate_temperatures_and_Rf_power.pdf
first_indexed	2023-09-18T20:40:49Z
last_indexed	2023-09-18T20:40:49Z
_version_	1777409352572862464

Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power

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