Hot embossing and injection molding of three-dimensional microcomponents
This paper discusses hot embossing and injection molding microreplication processes for the fabrication of three dimensional (3D) microcomponents. These techniques included specialized tooling and variothermal process control. The microcavities were fabricated by focused ion beam (FIB) sputtering...
| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2001
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27184/ http://irep.iium.edu.my/27184/1/064_BSME-ASME_2002_659-664.pdf |