Hot embossing and injection molding of three-dimensional microcomponents
This paper discusses hot embossing and injection molding microreplication processes for the fabrication of three dimensional (3D) microcomponents. These techniques included specialized tooling and variothermal process control. The microcavities were fabricated by focused ion beam (FIB) sputtering...
| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2001
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27184/ http://irep.iium.edu.my/27184/1/064_BSME-ASME_2002_659-664.pdf |
| Summary: | This paper discusses hot embossing and injection molding microreplication processes for
the fabrication of three dimensional (3D) microcomponents. These techniques included
specialized tooling and variothermal process control. The microcavities were fabricated by
focused ion beam (FIB) sputtering. Microgears, microgear trains, microlenses etc. were
successfully replicated from polymers. The overall size of these microcomponents were
few tens to few hundred micrometers. These replicated microcomponents were inspected
with scanning electron microscope where submicrometer accuracy and faithful replication
of cavity surface texture were observed. |
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