Micromilling of tungsten carbide using focused ion beam

Micromilling of tungsten carbide using focused ion beam

This paper describes the effect of focused ion beam (FIB) micromilling parameters on tungsten carbide for the fabrication of any microcomponents. The FIB parameters such as aperture size, ion dose, dwell time, etc. were investigated in this study. A series of experiments were conducted on tungsten...

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Main Authors: Ali, Mohammad Yeakub, Ong, A. S., Konneh, Mohamed
Format: Conference or Workshop Item
Language:English
Published: 2005
Subjects:
TJ Mechanical engineering and machinery
TS Manufactures
Online Access:http://irep.iium.edu.my/27180/
http://irep.iium.edu.my/27180/
http://irep.iium.edu.my/27180/1/060_ICME_2005_BUET_AM-24.pdf
id iium-27180
recordtype eprints
spelling iium-271802013-08-26T06:41:32Z http://irep.iium.edu.my/27180/ Micromilling of tungsten carbide using focused ion beam Ali, Mohammad Yeakub Ong, A. S. Konneh, Mohamed TJ Mechanical engineering and machinery TS Manufactures This paper describes the effect of focused ion beam (FIB) micromilling parameters on tungsten carbide for the fabrication of any microcomponents. The FIB parameters such as aperture size, ion dose, dwell time, etc. were investigated in this study. A series of experiments were conducted on tungsten carbide with varying operating parameters to establish the correlation how the parameters affect the micromilling process and quality of the final component. All the experiments were carried out with dry micromilling using serpentine scanning mode. Empirical models were formulated to predict the sputtered depth which increased with higher ion dose significantly but the relationship was nonlinear. Some of the experimental results are discussed with qualitative judgement as it was difficult to explain quantitatively. 2005 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/27180/1/060_ICME_2005_BUET_AM-24.pdf Ali, Mohammad Yeakub and Ong, A. S. and Konneh, Mohamed (2005) Micromilling of tungsten carbide using focused ion beam. In: International Conference on Mechanical Engineering 2005 (ICME2005), 28-30 December 2005, Dhaka, Bangladesh. http://www.buet.ac.bd/me/icme/icme2005/Proceedings/PDF/ICME05-AM-24.pdf
repository_type Digital Repository
institution_category Local University
institution International Islamic University Malaysia
building IIUM Repository
collection Online Access
language English
topic TJ Mechanical engineering and machinery
TS Manufactures
spellingShingle TJ Mechanical engineering and machinery
TS Manufactures
Ali, Mohammad Yeakub
Ong, A. S.
Konneh, Mohamed
Micromilling of tungsten carbide using focused ion beam
description This paper describes the effect of focused ion beam (FIB) micromilling parameters on tungsten carbide for the fabrication of any microcomponents. The FIB parameters such as aperture size, ion dose, dwell time, etc. were investigated in this study. A series of experiments were conducted on tungsten carbide with varying operating parameters to establish the correlation how the parameters affect the micromilling process and quality of the final component. All the experiments were carried out with dry micromilling using serpentine scanning mode. Empirical models were formulated to predict the sputtered depth which increased with higher ion dose significantly but the relationship was nonlinear. Some of the experimental results are discussed with qualitative judgement as it was difficult to explain quantitatively.
format Conference or Workshop Item
author Ali, Mohammad Yeakub
Ong, A. S.
Konneh, Mohamed
author_facet Ali, Mohammad Yeakub
Ong, A. S.
Konneh, Mohamed
author_sort Ali, Mohammad Yeakub
title Micromilling of tungsten carbide using focused ion beam
title_short Micromilling of tungsten carbide using focused ion beam
title_full Micromilling of tungsten carbide using focused ion beam
title_fullStr Micromilling of tungsten carbide using focused ion beam
title_full_unstemmed Micromilling of tungsten carbide using focused ion beam
title_sort micromilling of tungsten carbide using focused ion beam
publishDate 2005
url http://irep.iium.edu.my/27180/
http://irep.iium.edu.my/27180/
http://irep.iium.edu.my/27180/1/060_ICME_2005_BUET_AM-24.pdf
first_indexed 2023-09-18T20:40:25Z
last_indexed 2023-09-18T20:40:25Z
_version_ 1777409327130214400

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