Fabrication of micromold cavity for microreplication: A review
In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro disc...
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| Format: | Conference or Workshop Item |
| Language: | English |
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2008
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| Online Access: | http://irep.iium.edu.my/27157/ http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf |
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iium-27157 |
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eprints |
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iium-271572013-09-06T01:23:01Z http://irep.iium.edu.my/27157/ Fabrication of micromold cavity for microreplication: A review Ali, Mohammad Yeakub Khan, Ahsan Ali Mehfuz, R. Aishah, S. Hayati, N. Hajar, N. TS Manufactures In this paper, various fabrication techniques for micromold cavity are reviewed and discussed. Silicon and lithography based fabrication were being used for years for the fabrication of micromold cavity. In the later stage direct fabrication techniques such as focused ion beam, micro electro discharge machining, laser micromachining, tool based micromilling, etc., become cost effective and popular. These micromold cavities were used for mass production of microcomponents. The fabrication processes, advantages and disadvantages of these processes are discussed in this paper. The processes are also compared for the ease of process selection for a particular fabrication. 2008 Conference or Workshop Item PeerReviewed application/pdf en http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf Ali, Mohammad Yeakub and Khan, Ahsan Ali and Mehfuz, R. and Aishah, S. and Hayati, N. and Hajar, N. (2008) Fabrication of micromold cavity for microreplication: A review. In: International Conference on Mechanical and Manufacturing Engineering (ICME 2008), 21-23 May 2008, Johor Bahru, Malaysia. |
| repository_type |
Digital Repository |
| institution_category |
Local University |
| institution |
International Islamic University Malaysia |
| building |
IIUM Repository |
| collection |
Online Access |
| language |
English |
| topic |
TS Manufactures |
| spellingShingle |
TS Manufactures Ali, Mohammad Yeakub Khan, Ahsan Ali Mehfuz, R. Aishah, S. Hayati, N. Hajar, N. Fabrication of micromold cavity for microreplication: A review |
| description |
In this paper, various fabrication techniques for micromold cavity are reviewed and
discussed. Silicon and lithography based fabrication were being used for years for the
fabrication of micromold cavity. In the later stage direct fabrication techniques such as
focused ion beam, micro electro discharge machining, laser micromachining, tool based
micromilling, etc., become cost effective and popular. These micromold cavities were used
for mass production of microcomponents. The fabrication processes, advantages and
disadvantages of these processes are discussed in this paper. The processes are also compared
for the ease of process selection for a particular fabrication. |
| format |
Conference or Workshop Item |
| author |
Ali, Mohammad Yeakub Khan, Ahsan Ali Mehfuz, R. Aishah, S. Hayati, N. Hajar, N. |
| author_facet |
Ali, Mohammad Yeakub Khan, Ahsan Ali Mehfuz, R. Aishah, S. Hayati, N. Hajar, N. |
| author_sort |
Ali, Mohammad Yeakub |
| title |
Fabrication of micromold cavity for microreplication: A review |
| title_short |
Fabrication of micromold cavity for microreplication: A review |
| title_full |
Fabrication of micromold cavity for microreplication: A review |
| title_fullStr |
Fabrication of micromold cavity for microreplication: A review |
| title_full_unstemmed |
Fabrication of micromold cavity for microreplication: A review |
| title_sort |
fabrication of micromold cavity for microreplication: a review |
| publishDate |
2008 |
| url |
http://irep.iium.edu.my/27157/ http://irep.iium.edu.my/27157/1/048_ICME_2008_JB_MFG_ID-0127.pdf |
| first_indexed |
2023-09-18T20:40:22Z |
| last_indexed |
2023-09-18T20:40:22Z |
| _version_ |
1777409324472074240 |