Producing LIGA-competitive microcomponents
This paper presents a new technique to investigate deep microfeatures, and an alternative process to produce microcomponents. Micro-EDM and focused ion beam micromachining were combined to directly fabricate the mold features. The first process was to remove the bulk material while the later was to...
Main Authors: | , , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2000
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Subjects: | |
Online Access: | http://irep.iium.edu.my/27137/ http://irep.iium.edu.my/27137/1/036_SPIE_USA_2000_4147_49-57_Wayne.pdf |