Surface roughness of sputtered silicon. I. surface modeling
A mathematical model for the calculation of surface roughness was developed for focused ion beam (FIB) sputtering. The surface roughness function is a combination of the beam function and the material function. The beam function includes ion type, ion acceleration energy, and beam parameters. Fur...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis
2001
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/27111/ http://irep.iium.edu.my/27111/1/023_MaMP_2001_16%283%29_297-313.pdf |