Acoustic wave based MEMS devices for biosensing applications
This paper presents a review of acoustic-wave based MEMS devices that offer a promising technology platform for the development of sensitive, portable, real-time biosensors. MEMS fabrication of acoustic wave based biosensors enables device miniaturization, power consumption reduction and integrati...
Main Authors: | Voiculescu, Ioana, Nordin, Anis Nurashikin |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2012
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Subjects: | |
Online Access: | http://irep.iium.edu.my/26717/ http://irep.iium.edu.my/26717/ http://irep.iium.edu.my/26717/1/saw-ioana.pdf |
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