Acoustic wave based MEMS devices for biosensing applications

This paper presents a review of acoustic-wave based MEMS devices that offer a promising technology platform for the development of sensitive, portable, real-time biosensors. MEMS fabrication of acoustic wave based biosensors enables device miniaturization, power consumption reduction and integrati...

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Main Authors:	Voiculescu, Ioana, Nordin, Anis Nurashikin
Format:	Article
Language:	English
Published:	Elsevier 2012
Subjects:	T Technology (General) TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/26717/ http://irep.iium.edu.my/26717/ http://irep.iium.edu.my/26717/1/saw-ioana.pdf

id	iium-26717
recordtype	eprints
spelling	iium-267172012-11-29T00:07:21Z http://irep.iium.edu.my/26717/ Acoustic wave based MEMS devices for biosensing applications Voiculescu, Ioana Nordin, Anis Nurashikin T Technology (General) TK7885 Computer engineering This paper presents a review of acoustic-wave based MEMS devices that offer a promising technology platform for the development of sensitive, portable, real-time biosensors. MEMS fabrication of acoustic wave based biosensors enables device miniaturization, power consumption reduction and integration with electronic circuits. For biological applications, the biosensors are integrated in a microfluidic system and the sensing area is coated with a biospecific layer. When a bioanalyte interacts with the sensing layer, mass and viscosity variations of the biospecific layer can be detected by monitoring changes in the acoustic wave properties such as velocity, attenuation, resonant frequency and delay time. Few types of acoustic wave devices could be integrated in microfluidic systems without significant degradation of the quality factor. The acoustic wave based MEMS devices reported in the literature as biosensors and presented in this review are film bulk acoustic wave resonators (FBAR), surface acoustic waves (SAW) resonators and SAW delay lines. Different approaches to the realization of FBARs, SAW resonators and SAW delay lines for various biochemical applications are presented. Methods of integration of the acoustic wave MEMS devices in the microfluidic systems and functionalization strategies will be also discussed. Elsevier 2012 Article PeerReviewed application/pdf en http://irep.iium.edu.my/26717/1/saw-ioana.pdf Voiculescu, Ioana and Nordin, Anis Nurashikin (2012) Acoustic wave based MEMS devices for biosensing applications. Biosensors and Bioelectronics, 33. pp. 1-9. ISSN 0956-5663 http://www.sciencedirect.com/science/article/pii/S0956566311008633
repository_type	Digital Repository
institution_category	Local University
institution	International Islamic University Malaysia
building	IIUM Repository
collection	Online Access
language	English
topic	T Technology (General) TK7885 Computer engineering
spellingShingle	T Technology (General) TK7885 Computer engineering Voiculescu, Ioana Nordin, Anis Nurashikin Acoustic wave based MEMS devices for biosensing applications
description	This paper presents a review of acoustic-wave based MEMS devices that offer a promising technology platform for the development of sensitive, portable, real-time biosensors. MEMS fabrication of acoustic wave based biosensors enables device miniaturization, power consumption reduction and integration with electronic circuits. For biological applications, the biosensors are integrated in a microfluidic system and the sensing area is coated with a biospecific layer. When a bioanalyte interacts with the sensing layer, mass and viscosity variations of the biospecific layer can be detected by monitoring changes in the acoustic wave properties such as velocity, attenuation, resonant frequency and delay time. Few types of acoustic wave devices could be integrated in microfluidic systems without significant degradation of the quality factor. The acoustic wave based MEMS devices reported in the literature as biosensors and presented in this review are film bulk acoustic wave resonators (FBAR), surface acoustic waves (SAW) resonators and SAW delay lines. Different approaches to the realization of FBARs, SAW resonators and SAW delay lines for various biochemical applications are presented. Methods of integration of the acoustic wave MEMS devices in the microfluidic systems and functionalization strategies will be also discussed.
format	Article
author	Voiculescu, Ioana Nordin, Anis Nurashikin
author_facet	Voiculescu, Ioana Nordin, Anis Nurashikin
author_sort	Voiculescu, Ioana
title	Acoustic wave based MEMS devices for biosensing applications
title_short	Acoustic wave based MEMS devices for biosensing applications
title_full	Acoustic wave based MEMS devices for biosensing applications
title_fullStr	Acoustic wave based MEMS devices for biosensing applications
title_full_unstemmed	Acoustic wave based MEMS devices for biosensing applications
title_sort	acoustic wave based mems devices for biosensing applications
publisher	Elsevier
publishDate	2012
url	http://irep.iium.edu.my/26717/ http://irep.iium.edu.my/26717/ http://irep.iium.edu.my/26717/1/saw-ioana.pdf
first_indexed	2023-09-18T20:39:46Z
last_indexed	2023-09-18T20:39:46Z
_version_	1777409286438125568

Acoustic wave based MEMS devices for biosensing applications

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