Novel mems biosensor with integmted impedance and mass-sensing capabilities
A BIOSENSOR DEVICE (1) PROVIDING AN ANALYSE PLATFORM FOR DETECNNG CELL GROWTH, COMPRISING OFAN ALUMINIUM NITRIDE (AIN) BASE (2), A SHEAR HORIZONTAL-SURFACE ACOUSTIC WAVE (SH-SAW) RESONATOR INCLUDING AN INPUT TMNSDUCER (4) AND AN OUTPUT TRA.NSDUCER (5) SYMMETRICALLY POSmONED ON THE ALUMTNUM NTTRIOE...
| Main Authors: | , , , |
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| Format: | Patent |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/25808/ http://irep.iium.edu.my/25808/ http://irep.iium.edu.my/25808/1/Biosensor_MyIPO.pdf |
| Summary: | A BIOSENSOR DEVICE (1) PROVIDING AN ANALYSE PLATFORM FOR DETECNNG CELL GROWTH, COMPRISING OFAN
ALUMINIUM NITRIDE (AIN) BASE (2), A SHEAR HORIZONTAL-SURFACE ACOUSTIC WAVE (SH-SAW) RESONATOR INCLUDING AN
INPUT TMNSDUCER (4) AND AN OUTPUT TRA.NSDUCER (5) SYMMETRICALLY POSmONED ON THE ALUMTNUM NTTRIOE (ArN)BASE (2), A COUNTER ELECTRODE (6) POSMONED PAMLLEL TO WORKING ELECTRODES (7) ON THE ALUMINUM NITRIDE
(ArN) BASE (2), FOR TMNSMTTTTNG FREQUENCY VOLTAGE TOWARDS THE WrNG CELL (3), A PLURAUTY OF WORKTNG
ELECTRODES (7) POSMONED BENEATH THE LMNG CELL (3) ON THE ALUMINIUM NITRIDE (AIN) BASE (2) FOR RECEIVING
FREQUENCY VOLTAGE FROM THE LMNG CELL (3), AN IMPEDANCE ANALYZER (8) FOR RECEMNG IMPEDANCE READINGS FROM
THE COUNTER ELECTRODE (6) AND WORKING ELECTRODES (7), AND A BACK-ETCHED SIUCON SUBSTMTE (9) COUPLED TO
THE ALUMINIUM NTTRIDE (AIN) BASE (2), FOR REDUCTNG C1JRRENT LOS' WHEREIN THE LMNG CErL (3) IS POSmONED rN
BETWEEN OF THE INPUT TRANSDUCER AND OUTPUT TRANSDIrcER ON THE ALUMINIUM NITRIDE (AIN) BASE (4). |
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